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A flexible photoelectric sensor based on three-dimensional conformal graphene and its manufacturing method

A photoelectric sensor and graphene technology, applied in the field of sensors, can solve the problems of complex sensor structure, poor, non-flexible biocompatibility, etc., and achieve good biocompatibility, convenient processing, and good flexibility

Active Publication Date: 2018-10-30
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these sensors are complex in structure, mostly inflexible and not biocompatible

Method used

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  • A flexible photoelectric sensor based on three-dimensional conformal graphene and its manufacturing method
  • A flexible photoelectric sensor based on three-dimensional conformal graphene and its manufacturing method
  • A flexible photoelectric sensor based on three-dimensional conformal graphene and its manufacturing method

Examples

Experimental program
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Effect test

Embodiment 2

[0054] Example 2: Fabrication of "PDMS / 3D Conformal Graphene / PDMS" Composite Photoelectric Sensor and Testing of Its Sensing Characteristics

[0055] Step 1: Preparation of 3D conformal graphene

[0056] First place the substrate copper foil in acetone, 95vol% ethanol, and pure water for ultrasonic cleaning for 10-15 minutes, blow dry with nitrogen, and then prepare a microscopic surface structure with a three-dimensional inverted pyramid array by photolithography and wet etching. Silicon wafer substrate;

[0057] Then place the above-mentioned silicon chip substrate with the microscopic surface structure of three-dimensional inverted pyramid array in acetone, 95vol% ethanol, and pure water for ultrasonic cleaning for 10-15 minutes, blow dry with nitrogen, and then place it in the vacuum chamber of the tube furnace CVD system In vivo preparation of three-dimensional conformal graphene (such as figure 1 shown), to obtain "three-dimensional conformal graphene / silicon chip subs...

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Abstract

The invention relates to a flexible photoelectric sensor based on three-dimensional conformal graphene and a preparation method thereof. The photoelectric sensor includes a high molecular polymer and a three-dimensional conformal graphene, and the high molecular polymer is compounded under the conformal graphene as graphene the substrate. After the three-dimensional graphene prepared by tubular CVD is transferred by the method of polymer complex transfer, the sensor forms a double-layer structure of "three-dimensional conformal graphene and polymer", and then the three-dimensional graphene is connected by silver paste brushing and other methods. The two ends of conformal graphene and silver or other metal wires are used as electrodes, and the upper polymer can also be spin-coated to form a three-layer structure of "polymer, three-dimensional conformal graphene and polymer". The flexible photoelectric sensor based on three-dimensional conformal graphene provided by the present invention has the advantages of simple structure, high sensitivity, flexibility and good biocompatibility, and has very good application prospects in the fields of instrumentation, optoelectronic devices, and flexible electronic skin.

Description

technical field [0001] The invention belongs to the field of sensors, in particular to a flexible photoelectric sensor based on three-dimensional conformal graphene and a manufacturing method thereof. Background technique [0002] A photoelectric sensor is a sensor that can sense changes in light and convert it into a usable electrical signal output. Photoelectric sensors are usually composed of three parts, they are: transmitter, receiver and detection circuit. A photoelectric sensor with a photoelectric device as a conversion unit can be used to detect other non-electrical quantities that directly cause changes in the amount of light, such as part diameter, surface roughness, strain, displacement, vibration, speed, acceleration, and recognition of object shape and working status Wait. [0003] At present, the photosensitive diode is the most common light sensor. Its working method is: when there is no light, it is the same as the ordinary diode. When there is light, the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/42H01L51/46H01L51/48H01L51/44
CPCH10K85/00H10K30/00H10K30/81Y02E10/549Y02P70/50
Inventor 魏大鹏宋雪芬孙泰申钧史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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