Plasma in-situ characterization system

A plasma and characterization technology, which can be used in instruments, digital variable display, radiation pyrometry, etc., and can solve problems such as difficulties in plasma state characterization

Inactive Publication Date: 2016-12-21
CHINA PETROLEUM & CHEM CORP +1
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  • Description
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Problems solved by technology

[0005] In order to solve the difficult problem of plasma state characterization in the prior art, the present invention provides a plasma in-situ characterization system

Method used

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  • Plasma in-situ characterization system

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Embodiment Construction

[0012] Combine below figure 1 The present invention will be described in detail.

[0013] A plasma in-situ characterization system includes a plasma discharge reactor, an emission spectrometer 1 for characterizing plasma, a high-speed image capture system 2 , a digital oscilloscope 3 , an infrared imager 4 and an online mass spectrometer 5 . The optical fiber probe of the emission spectrometer 1 is placed in the discharge core area of ​​the plasma discharge reactor, and the active species that can de-excite and radiate photons during the plasma discharge process are monitored online. On the one hand, the spectral peak position in the emission spectrum can be qualitatively determined To describe the types of active species in the plasma, on the other hand, the intensity of the spectral peaks can be used to quantitatively describe the amount of active species in the plasma. The first image collector of the high-speed image capture system 2 is also placed in the discharge core a...

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Abstract

The invention relates to a plasma in-situ characterization system, which comprises an emission spectrometer, a high speed image capturing system, a digital oscilloscope, an infrared imager and an online mass spectrometer, wherein an optical fiber probe and a first image collector are arranged in the discharge core region of a plasma discharge reactor, the voltage probe attachment high voltage electrode of the digital oscilloscope is connected to the high voltage electrode of the plasma discharge reactor, the voltage probe attachment grounding electrode is connected to a ground wire, the current probe is connected to the plasma discharge reactor, the second image collector of the infrared imager is towards the plasma discharge core region, and the sample injection tube of the online mass spectrometer is connected to the outlet of a plasma discharge reaction zone. According to the present invention, various parts of the plasma in-situ characterization system are synergistically matched, such that the types and the number of the plasma active species, the plasma discharge state, the current voltage waveform, the plasma electron density, the plasma zone temperature distribution, the plasma zone product composition and the like can be real-timely monitored in the full-direction, and the in-situ characterization can be performed on the plasma discharge process.

Description

technical field [0001] The invention relates to a plasma characterization system, in particular to a plasma in-situ characterization system. Background technique [0002] Plasma is an aggregate composed of charged particles and various neutral particles, and its positive and negative charges are equal, so it is electrically neutral macroscopically. Plasma is the fourth form of matter besides solid, liquid and gas. More than 99% of matter in the universe exists in a plasma state. Artificial plasma can be obtained by gas or liquid discharge. Discharge methods include dielectric barrier discharge, corona discharge, spark discharge, glow discharge and arc discharge. Plasmas are unique in that they activate molecules with energetic electrons. [0003] At present, plasma technology has been applied in many fields, such as nuclear fusion power generation, spray coating, surface modification of materials, thin film deposition and etching, preparation of particulate materials, et...

Claims

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Application Information

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IPC IPC(8): G01N21/73G01J5/00G01N27/62G01R13/02
CPCG01J5/00G01N21/73G01N27/62G01R13/02G01J5/485
Inventor 张婧石宁徐伟孙峰朱云峰金满平
Owner CHINA PETROLEUM & CHEM CORP
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