End surface coupling raster chip grade multi-ring waveguide chamber cascading vector high sensitivity sound sensor

Abstract

The invention relates to the optical field and the micro nano system field, and particularly relates to an end surface coupling raster chip grade multi-ring waveguide chamber cascading vector high sensitivity sound sensor based on an echo wall mode. The end surface coupling raster chip grade multi-ring waveguide chamber cascading vector high sensitivity sound sensor comprises a center annular waveguide chamber; orientation annular waveguide chambers are uniformly coupled on the circumference of the center annular waveguide chamber; a nanometer end surface coupling input raster is coupled to the center annular waveguide chamber; a nanometer end surface coupling output raster is coupled on each orientation annular waveguide chamber; each nano end surface coupling output raster is connected to a photoelectric detector; the photoelectric detector is connected to an AD collection module; the AD collection module is connected to the FPGA processor; and the FPGA processor is connected to a PC. Compared with a traditional acoustic detection system, the end surface coupling raster chip grade multi-ring waveguide chamber cascading vector high sensitivity sound sensor solves problems that the traditional acoustic detection system is low in sensitivity, big in signal transmission loss and poor in anti-electromagnetic interference, and realizes high sensitivity and long distance normal acoustic signal detection under an extreme environment like strong electromagnetic interference.

Description

technical field [0001] The invention relates to the field of optics and the field of micro-nano systems, in particular to an end-face coupled grating chip-level multi-ring waveguide cavity cascaded vector high-sensitivity acoustic sensor based on a whispering gallery mode. Background technique [0002] With the advancement of MEMS technology, sensors based on MOEMS technology have the characteristics of optical sensors and MEMS technology, and have the advantages of good anti-electromagnetic interference, strong environmental adaptability, miniaturization, easy integration, low cost, and high reliability. It is suitable for the detection and identification of deformation, vibration / acoustic signals, etc. in high-voltage substation environment, biochemical analysis, military and other applications. Optical fiber microphone array detection is a new method for detecting low-altitude slow small targets and ground targets in addition to radar and photoelectricity. It can meet the...

AI Technical Summary

Problems solved by technology

[0003] Modern wars are more asymmetric, high-intensity local wars and special wars. The battlefield has a complex electromagnetic environment, and the means of attack are more concealed. The protection technology for traditional radar and photoelectric detection is also changing with each passing day, especially strong electromagnetic pulse and broadband electromagnetic wave interference. The application of new equipment such as sensors has questioned the detection capability and battlefield survivability of traditional acoustic sensor detection equipment. Traditional acoustic sensors are susceptible to interference and damage by external electromagnetic waves due to the use of current as the carrier medium.

In addition, the width and sensitivity of its detection frequency cannot meet the application needs.

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