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High-accuracy organic light-emitting device (OLED) component preparation device and method

A preparation device and high-precision technology, applied in the field of OLED, can solve the problems of material waste, difficulty in preparing high-precision OLED devices, mask material and high production requirements, etc., to save evaporation materials, accurately control film thickness, increase effect of number

Inactive Publication Date: 2017-02-22
FUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this technology, the substrate is almost close to the mask, which has high requirements on the material and production of the mask, and it is difficult to prepare high-precision OLED devices, and the long distance between the evaporation source and the substrate causes waste of materials.

Method used

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  • High-accuracy organic light-emitting device (OLED) component preparation device and method
  • High-accuracy organic light-emitting device (OLED) component preparation device and method
  • High-accuracy organic light-emitting device (OLED) component preparation device and method

Examples

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preparation example Construction

[0028] A preparation device of a high-precision OLED device of the present invention includes an evaporation source array, a substrate, and a transmission device. The evaporation source array is formed by arranging several evaporation sources. The material in the evaporation source is heated to form a molecular flow and evaporates vertically upward to the substrate. The movement of the substrate or the evaporation source array is driven by the transmission device to complete the evaporation of the substrate and form an OLED device.

[0029] Each evaporation source in the evaporation source array is equipped with only one sub-pixel evaporation material, three evaporation sources are a basic unit, and the three evaporation sources are respectively placed with red, green and blue sub-pixel evaporation materials, and a basic unit The position of the evaporation source for placing the red, green and blue hair sub-pixel materials in the center is adjustable. Each evaporation source ...

Embodiment 1

[0040] The evaporation of the light-emitting layer of the organic electroluminescent device (OLED) in this embodiment is as follows:

[0041] (1) Processing substrate:

[0042] Use pure water, acetone, ethanol, and pure water to ultrasonically clean the ITO glass for 10-15 minutes each, and then dry the washed ITO glass in an oven or blow dry with nitrogen. Then plasma treatment or UV treatment is performed on the clean and dry substrate.

[0043] (2) Evaporation of luminescent layer:

[0044]Place the above-mentioned ITO glass substrate with anode in a vacuum chamber, the surface of the substrate facing the evaporation source is directly covered with a mask, the area of ​​the substrate is 5cm*5cm; the array of the mask is 96*64, according to the mask The number of combinations of evaporation heads selected for array graphics is 64 in a row, and the diameter of the evaporation heads is 100 μm. The spacing of the evaporation heads depends on the spacing of the 64 sub-pixels i...

Embodiment 2

[0047] The structure adopted by the organic electroluminescence device (OLED) in this embodiment may be:

[0048] Substrate / anode / hole injection layer (HIL) / hole transport layer (HTL) / organic light emitting layer (EML) / electron transport layer (ETL) / electron injection layer (ETL) / cathode.

[0049] Specifically, the structure adopted by the structured organic electroluminescent device in this embodiment is as follows:

[0050] ITO / HAT(CN)6 / NPB / DPVBi / Bphen / LiF / Al

[0051] The preparation method of the organic electroluminescent device of the present embodiment is as follows:

[0052] (1) Processing substrate:

[0053] Clean the ITO glass with pure water, acetone, ethanol, and pure water in sequence, and then dry the washed ITO glass in an oven or blow dry with nitrogen; plasma treatment or UV treatment can be performed on the substrate.

[0054] (2) Evaporation of each functional layer:

[0055] Place the above-mentioned ITO glass substrate with anode in a vacu...

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Abstract

The invention relates to a high-accuracy organic light-emitting device (OLED) component preparation device and method. The device comprises an evaporation source array, a substrate, a transmission device and a mask plate, and the mask plate is matched with the evaporation source array. A plurality of evaporation sources are arrayed to form the evaporation source array. Materials in the evaporation sources are evaporated vertically upwards to the substrate. Evaporating-plating of the substrate is completed due to the fact that the substrate or the evaporation source array are driven by the transmission device to move, so that an OLED component is formed. According to the high-accuracy OLED component preparation device and method, the distance between the substrate and the mask plate is enlarged, and the influence exerted on evaporating-plating by the mask plate is reduced; the distances between the substrate and the evaporation sources are reduced, so that the evaporation materials are less diffused into the evaporating environment, and the evaporation materials are saved; and in addition, the intervals between every two evaporation sources are reduced, the intervals between every two holes in the mask plate are reduced, the point-to-point evaporation is achieved, the number of subpixels within a unit area is increased, and the preparation of the OLED component with high accuracy is achieved.

Description

technical field [0001] The invention belongs to the field of OLEDs, and in particular relates to a preparation device and a preparation method of a high-precision OLED device. Background technique [0002] Organic light-emitting devices (Organic light-emitting devices, OLEDs) are recognized as pioneers in the field of next-generation displays. OLED devices have active light emission, panel light emission, wide viewing angle, short response time, high luminous efficiency, wide color gamut, and high operating voltage. Low, the thickness of the device is thin, it can be made into a curved panel, the manufacturing process is relatively simple, and the cost is low. [0003] As a surface light source, OLED is considered to have a significant impact on solid-state lighting because it emits light close to natural light, is environmentally friendly, can be prepared by simple processes such as evaporation, spin coating, and ion beam sputtering, and can be deposited on a flexible subst...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/04H01L51/56
CPCC23C14/042C23C14/24H10K71/00
Inventor 叶芸郭太良严群张永爱吕珊红徐中炜
Owner FUZHOU UNIV
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