A method for realizing isolation of semiconductor devices
A device isolation and semiconductor technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of voids or cracks in trenches, high side profile requirements, etc., and achieve fast filling rate, excellent gap filling ability, low cost effect
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[0045] The present invention will be described in detail below in conjunction with the accompanying drawings and specific examples.
[0046] Isolation of nanoscale silicon-based devices can be achieved according to the following steps:
[0047] 1) ALD on (100) bulk silicon substrate SiO 2 , Si 3 N 4 The stacked structure acts as a hard mask layer, such as figure 1 shown;
[0048] 2) Electron beam lithography defines the pattern of the active region, wherein the line width is 40nm, the minimum line spacing is 30nm, and the maximum line spacing is 0.5μm. Such as figure 2 shown;
[0049] 3) Anisotropically etching the hard mask layer, transferring the pattern defined by photolithography to the hard mask, exposing the silicon substrate;
[0050] 4) Remove the photoresist, such as image 3 shown;
[0051] 5) Anisotropic dry etching of silicon Transfer the pattern of the hard mask to the silicon substrate to form the active area of the silicon, such as Figure 4 ...
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