Method for preparing silicon dioxide passivation layer through thermal decomposition
A silicon dioxide and passivation layer technology, applied in the direction of final product manufacturing, sustainable manufacturing/processing, climate sustainability, etc., can solve the problem of large thermal damage to silicon wafers, high energy consumption, and expensive growth and deposition equipment for alumina and other problems to achieve the effect of preventing falling off, improving binding force and stability, and promoting compatibility
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Embodiment 1
[0014] Using the scheme of this application, carry out passivation treatment on silicon wafers with the same material and specifications as those in the above-mentioned blank control, and the specific operations are as follows:
[0015] (1) Metasilicate (H 2 SiO 3 ), shellac, and ethanol are mixed according to the mass ratio of 1:8:4 and then fully stirred to obtain a viscous glue;
[0016] (2) Apply the viscous glue obtained in step (1) evenly on the surface of the diffused silicon chip and fully dry it at 80°C, then place the silicon chip in a nitrogen atmosphere at 350°C for 22 minutes, Natural cooling is to complete the passivation of the silicon wafer surface.
Embodiment 2
[0024] Using the scheme of this application, carry out passivation treatment on silicon wafers of the same material and specifications as in the blank control, the specific operations are:
[0025] (1) Metasilicate (H 2 SiO 3 ), shellac, and ethanol are mixed according to the mass ratio of 1:6:6 and then fully stirred to obtain a viscous glue;
[0026] (2) Apply the viscous glue obtained in step (1) evenly on the surface of the diffused silicon chip and fully dry it at 80°C, then place the silicon chip in a nitrogen atmosphere at 320°C for 24 minutes, Natural cooling is to complete the passivation of the silicon wafer surface.
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