An implantable flexible neural microelectrode comb and its preparation method and implantation method

An implantable, micro-electrode technology, applied in the field of neurobiological materials and microelectronics science, can solve problems such as difficult implantation inside the brain, insufficient rigidity, etc.

Active Publication Date: 2019-05-07
BEIJING BCIFLEX MEDICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Flexible microelectrodes are compatible with the brain due to their mechanical strength, but are not easily implanted into the brain due to insufficient rigidity. Therefore, it is necessary to study methods for implanting ultra-thin flexible neural electrodes into the deep part of the brain.

Method used

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  • An implantable flexible neural microelectrode comb and its preparation method and implantation method
  • An implantable flexible neural microelectrode comb and its preparation method and implantation method
  • An implantable flexible neural microelectrode comb and its preparation method and implantation method

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preparation example Construction

[0117] The specific embodiment part of the present invention provides the preparation method of the implantable flexible neural microelectrode comb, such as Figure 4 Shown, its preparation method comprises the following steps:

[0118] (1) Spin-coat positive photoresist on the carrier, pre-baking, photo-etching out the marking pattern, leaving the position of the pad to protect with photoresist, post-baking to harden the film, and removing the residual glue;

[0119] (2) Evaporating or sputtering a sacrificial layer on the carrier obtained after step (1), peeling off to form a sacrificial layer and a marking pattern;

[0120] (3) In step (2), the side of the carrier on which the aluminum sacrificial layer and the marking pattern are formed is spin-coated with a flexible substrate material, which is sequentially subjected to pre-baking, exposure, post-baking and development to form a flexible substrate layer. Hard film;

[0121] (4) Spin-coat positive photoresist on the flex...

Embodiment 1

[0133] This embodiment provides an implantable flexible neural microelectrode comb, which is mainly composed of a flexible substrate layer 1, a flexible insulating layer 2, and metal Au arranged between the flexible substrate layer 1 and the flexible insulating layer 2. The flexible substrate layer 1 and the flexible insulating layer 2 are made of SU-8 photoresist, the thickness of the flexible substrate layer 1 and the flexible insulating layer 2 are both 5 μm, and the metal Au connecting layer 3 The thickness is 100nm.

[0134] The flexible neural microelectrode comb includes a comb-like structure 4, a grid structure 5, a solid structure 6 and a pad 7 connected in sequence; the comb-like structure 4 is provided with electrode sites 8; the pad 7 There are welding points on it.

[0135] The metal Au connection line layer 3 is composed of a metal Au connection line, the line width of the metal Au connection line is 10 μm, and the metal Au connection line connects the electrode...

Embodiment 2

[0143] This embodiment provides a kind of flexible neural microelectrode comb, which mainly consists of a flexible substrate layer 1, a flexible insulating layer 2 and a metal platinum connecting wire arranged between the flexible substrate layer 1 and the flexible insulating layer 2 The material used for the flexible substrate layer 1 and the flexible insulating layer 2 is SU-8, the thickness of the flexible substrate layer 1 and the flexible insulating layer 2 are both 5 μm, and the thickness of the metal platinum connecting wire layer 3 is 100 nm.

[0144] The flexible neural microelectrode comb includes a comb-like structure 4, a grid structure 5, a solid structure 6 and a pad 7 connected in sequence; the comb-like structure 4 is provided with electrode sites 8; the pad 7 There are welding points on it.

[0145] The metal platinum connection line layer 3 is composed of metal platinum connection lines, the line width of the metal platinum connection line is 5 μm, and the me...

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Abstract

The invention provides an implantable flexible nerve microelectrode comb and its preparation method and implantation method. The flexible nerve microelectrode comb is mainly composed of a flexible substrate layer, a flexible insulating layer and an The metal connection line layer is composed of; the flexible neural microelectrode comb includes a comb-shaped structure, a grid structure, a solid structure and a pad connected in sequence; electrode sites are provided on the comb-shaped structure; welding points are provided on the pad; The metal connection wire layer is composed of metal connection wires, and the metal connection wires connect the electrode sites and the welding points; there is no flexible insulating layer on the surface of the electrode sites and the welding points. The flexible neural microelectrode comb prepared by the invention has a gradual structure from line to net to surface, which improves the mechanical stability in the deformation process. The mechanical properties of the implantable flexible neural microelectrode comb match the brain tissue, the implantation area is small, and it will not cause inflammation in the brain, and it can perform multi-point, long-term stable tracking and measurement of EEG signals.

Description

technical field [0001] The invention belongs to the technical field of neurobiological materials and microelectronics, and relates to a flexible neural microelectrode comb, a preparation method and an implantation method thereof, in particular to an implantable flexible neural microelectrode comb, a preparation method and an implantation method. Background technique [0002] Neural microelectrodes are key components connecting neural tissue and external devices, and have broad application prospects in adjuvant therapy for neurological diseases and cognitive behavior. The quality of neural microelectrodes directly determines the ultimate performance of the neural activity recording system or neural function reconstruction system. An ideal implantable neural electrode needs to meet the following characteristics: as small as possible implant damage, effective recording and stimulation, good biocompatibility and long-term stability, etc. [0003] At present, the most widely use...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61B5/04A61B5/0478B81C1/00
CPCB81C1/00015B81C1/00166A61B5/24A61B5/291H05K3/0023H05K1/118H05K2201/09681H05K3/007H05K2201/0154H05K1/189A61B5/0031A61B2562/043A61B2562/028A61B2562/125A61B2562/0209A61B2562/164H05K1/028H05K1/09H05K3/14H05K3/28
Inventor 方英王晋芬杜明德管寿梁蔚文静
Owner BEIJING BCIFLEX MEDICAL TECH CO LTD
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