Gas sensor array and manufacturing method thereof

A gas sensor and array technology, which is applied in semiconductor/solid-state device components, gaseous chemical plating, and manufacturing microstructure devices, etc., can solve the problems of insufficient sensitivity and selectivity, and achieve adjustable printing thickness, adjustable types, Ease of extraction of measured effects

Inactive Publication Date: 2017-05-17
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The main purpose of the present invention is to overcome the deficiencies of the prior art, provide a gas sensor array and its preparation method, and solve the problem of insufficient sensitivity and selectivity of the existing gas sensor when detecting ppb level VOCs

Method used

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  • Gas sensor array and manufacturing method thereof
  • Gas sensor array and manufacturing method thereof
  • Gas sensor array and manufacturing method thereof

Examples

Experimental program
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preparation example Construction

[0043] In another embodiment, a method for preparing the gas sensor array includes the following steps:

[0044] (1) A patterned metal electrode array is processed on the substrate, which is used as the conductive lead of each resistive gas sensor;

[0045] (2) transferring the graphene film to the substrate, and patterning the graphene film to form each gas-sensitive resistor in the array;

[0046] (3) Covering the polymer film on the graphene film, wherein the film types and / or film thicknesses of the polymer films of each gas sensor are different.

[0047]In a preferred embodiment, in step (1), a patterned metal electrode array is processed on the substrate by a lift-off process.

[0048] In a preferred embodiment, in step (2), the graphene film is prepared by a chemical vapor deposition (CVD) process and then transferred to the substrate, and the graphene on the substrate is patterned by plasma etching.

[0049] In a more preferred embodiment, in step (2), a graphene fil...

example 1

[0057] The substrate is a silicon oxide sheet, and the metal electrode is a spiral aluminum electrode. The schematic diagram of its structure is as follows: figure 1 shown. A spiral electrode array is processed on the substrate by a photolithographic lift-off process to form the conductive leads of each gas-sensitive resistor; graphene is prepared by a chemical vapor deposition (CVD) process, transferred to the electrode, and the graphite is etched by plasma Graphene is patterned to form individual gas-sensitive resistors in the array; different types of polymers are printed on the sensitive areas of each sensor through an inkjet printing process, and dried to form a polymer film.

example 2

[0059] The substrate is a silicon oxide sheet, and the metal electrode is an interdigitated aluminum electrode. The schematic diagram of its structure is as follows: figure 2 shown. The interdigitated electrode array is processed on the substrate through the photolithography lift-off process to form the conductive leads of each gas sensitive resistor; the graphene is prepared by the chemical vapor deposition (CVD) process, transferred to the electrode, and used for plasma etching. Graphene is patterned to form each gas-sensitive resistor in the array; different types of polymers are printed on the sensitive areas of each sensor through an inkjet printing process, and dried to form a polymer film.

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Abstract

The invention discloses a gas sensor array and a manufacturing method thereof. The gas sensor array comprises a substrate and a group of resistive gas sensors formed on the substrate, wherein each gas sensor in the array comprises a gas sensing resistor formed by a graphic graphene film on the substrate and a polymer film with which the graphene film is covered; the substrate is provided with a graphic metal electrode array; the metal electrode array constructs a conductive lead for each gas sensing resistor; the film type and/or film thickness of the polymer film of each gas sensor is different. By adopting the gas sensor array, the sensitivity and selectivity of the gas sensors can be improved remarkably during detection of the presence of ppb-level VOCs (Volatile Organic Compounds).

Description

technical field [0001] The invention relates to a gas sensor array and a preparation method thereof. Background technique [0002] The demand for gas detection applications is increasing. Whether it is the detection of gas pollutants in the environment or exhaled breath detection for disease analysis, small, portable and easy-to-use high-sensitivity gas sensors are required. Especially for exhaled breath detection, where the concentration of volatile organic compounds (VOCs), which are biological indicators of human health status, is extremely low, usually at the ppb level. Moreover, multiple groups of components interfere with each other, which puts forward high requirements on the sensitivity and selectivity of the gas sensor. [0003] The most mature gas sensor is a semiconductor resistive sensor, which usually uses metal oxides as the gas-sensing material, which can achieve rapid response and high-sensitivity measurement of specific gases. This type of sensor is also s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/04G01N27/12B81C1/00B81B7/02
CPCG01N27/04B81B7/02B81C1/00015G01N27/12
Inventor 董瑛杨拓宇王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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