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Laser flexible micro-processing system and method based on liquid crystal spatial light modulator

A spatial light modulator and spatial light modulation technology, applied in the field of laser applications, can solve problems such as low energy utilization, low processing efficiency, and poor adaptability, achieve high adaptability and flexibility, and correct wavefront aberrations

Active Publication Date: 2017-05-31
HUBEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of low processing efficiency, low energy utilization rate and poor adaptability in the prior art, the present invention provides a laser flexible micromachining system and method based on a liquid crystal spatial light modulator

Method used

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  • Laser flexible micro-processing system and method based on liquid crystal spatial light modulator
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  • Laser flexible micro-processing system and method based on liquid crystal spatial light modulator

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Embodiment 1

[0024] Embodiment 1: The present invention provides a laser flexible micromachining method based on a liquid crystal spatial light modulator, comprising the following steps:

[0025] Step 1, use the superimposed GL algorithm or the iterative GS algorithm in the Labview algorithm to generate a hologram with the specified laser beam position and quantity, such as figure 2 As shown, and the hologram is loaded on the second spatial light modulation SLM7 (hereinafter referred to as "SLM7"), and the first spatial light modulation SLM6 (hereinafter referred to as "SLM6") does not load any hologram and is used as a mirror; this implementation The example Labview algorithm, SLM6 and SLM7 are controlled by computer 20, the laser beams are at any position and any number, and the hologram is generated by superposition of multiple gratings, and the hologram will also change when the position or number of beams is changed.

[0026] Step 2, inject the laser beam emitted by the laser 1 into ...

Embodiment 2

[0030] Embodiment 2: The present invention provides a laser flexible micromachining method based on a liquid crystal spatial light modulator, comprising the following steps:

[0031]Step 1, first use the SLM control software to generate a phase hologram whose gray value varies with the polar angle, as shown in image 3 As shown, and the hologram is loaded on the SLM7, and the SLM6 does not load any hologram, which is used as a mirror; the phase hologram takes the center as the origin, and the gray value changes gradually with the change of the polar angle, and the range of the angle change is It is 0-4π.

[0032] Step 2, adjust the angles of the λ / 2 wave plate 3 and the λ / 4 wave plate 8 respectively, so that the λ / 2 wave plate 3 is 22.5° to the fast axis, and the λ / 4 wave plate 8 is -45° to the fast axis; Both the λ / 2 wave plate 3 and the λ / 4 wave plate 8 are multi-stage wave plates, the λ / 2 wave plate 3 is installed in front of the SLM7, and the λ / 4 wave plate 8 is installed...

Embodiment 3

[0036] Embodiment 3: The present invention provides a laser flexible micromachining method based on a liquid crystal spatial light modulator, comprising the following steps:

[0037] Step 1. First, use the SLM control software to generate a gray-scale mask map of the anti-Gaussian distribution and simulate the binary grating, and then use the drawing software to add the pattern that needs to be shaped into the binary grating to form a mask map, such as Figure 4 shown. The adjustment range of the grayscale of the mask image is 0-255, and at the same time, the grayscale value of the graphics in the shaping area is adjusted to 0, and the grayscale values ​​of the binary grating are respectively 0 and 105.

[0038] Step 2, load the grayscale mask image of the inverse Gaussian distribution obtained in step 1 onto the SLM6, load the mask image containing the simulated binary grating onto the SLM7, and move the position of the mask image so that the center of the image is aligned wi...

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Abstract

The invention discloses a laser flexible micro-processing system and method based on a liquid crystal spatial light modulator. The system comprises a laser, a first reflecting mirror, a half-wave plate, a beam expander, a second reflecting mirror, a first spatial light modulator, a second spatial light modulator, a quarter-wave plate, a first lens, a third reflecting mirror, a spatial filter, a fourth reflecting mirror, a second lens, a beam splitter, a third lens, a CCD camera, a galvanometer, a field lens, a working table and a computer. With the utilization of the wavefront modulation characteristic of the liquid crystal spatial light modulator, a widely adaptable flexible laser processing technology which is controllable in multiple parameters such as laser beam quantity, beam shape and quality, polarization state and angular momentum is provided; in conjunction with wavefront measurement and feedback technology, not only can wave front aberration be corrected, but also a high-energy beam can be decomposed into random two-dimensional or three-dimensional low-energy multiple beams, and parameters of the beams such as shape and polarization state can be flexibly controlled, so that the laser processing technology has the advantages of high quality, high efficiency, extremely high adaptability and flexibility.

Description

technical field [0001] The invention belongs to the technical field of laser applications, and relates to a laser flexible micromachining system and method, in particular to a laser flexible micromachining system and method based on a liquid crystal spatial light modulator. Background technique [0002] Laser has the advantages of high energy density, good directionality, high coherence, and small heat-affected zone, and is favored in the field of industrial processing. Laser processing is an important application in the laser industry. Compared with conventional mechanical processing, laser processing is more Precise, more accurate and faster. This technology uses the characteristics of the interaction between the laser beam and the material to process various materials including metal and non-metal, involving welding, cutting, marking, drilling, heat treatment, forming, etc. processing technology. [0003] At present, domestic laser processing mainly has great advantages ...

Claims

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Application Information

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IPC IPC(8): B23K26/064B23K26/067B23K26/70
CPCB23K26/064B23K26/0665B23K26/067B23K26/702
Inventor 翟中生汪于涛吕清花张艳红张骆刘顿娄德元杨奇彪陈列
Owner HUBEI UNIV OF TECH
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