Fluxgate sensor and manufacturing method thereof
A technology of a fluxgate sensor and a manufacturing method, applied to instruments, measuring magnetic variables, measuring devices, etc., can solve the problems affecting the sensitivity and noise performance of the fluxgate sensor, low sensitivity of demagnetization effect, and small cross-sectional area of the magnetic core, etc. , to achieve the effect of easy mass production, low power consumption and small size
Inactive Publication Date: 2017-05-31
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0006] Toroidal structure fluxgates, such as figure 2 As shown, advantage: low noise; defect: low sensitivity due to demagnetization effect
Due to the limited chip area of the integrated fluxgate sensor, the number of turns is low and the cross-sectional area of the magnetic core is small. In order to saturate the magnetic core, high-frequency drive must be used, which seriously affects the sensitivity and noise performance of the fluxgate sensor.
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[0035] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0036] A fluxgate sensor consists of three parts: a magnetic core, an excitation coil, and an induction coil. The development of the fluxgate probe consists of three parts: first, the excitation coil, which needs to be used to provide the excitation magnetic field; then the most important magnetic core, which is made of soft magnetic materials; finally, the induction coil, which is used to output the fluxgate Signal.
[0037] The magnetic core is generally made of high magnetic permeability material. The three ferromagnetic elements, iron, cobalt and nickel, are the basic components of the mag...
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The invention relates to a fluxgate sensor and a manufacturing method thereof. According to the method, the film growth technology is utilized to generate a soft-magnetic material layer (a permalloy film) taken as a magnetic core on a surface of an insulation substrate; after an insulation layer is formed on the soft-magnetic material layer, a metal conduction layer is deposited, permalloy molecules can be artificially arranged through the film growth technology, and high precision control on uniformity and thickness is realized; the etching technology is utilized to etch the alloy film into an excitation coil and an induction coil, the flow is monitored by apparatus equipment, and the nano-level fluxgate sensor is formed. The method is advantaged in that manpower is saved, the speed is quick, efficiency is high, a defect rate is low, manpower cost is substantially saved after one-time investment, and the fluxgate sensor has advantages of small volume, high precision, quite low power consumption, high sensitivity, mass-batch production and high yield.
Description
technical field [0001] The invention relates to a fluxgate sensor and a manufacturing method thereof. Background technique [0002] The magnetic field widely exists in the earth-sun space and in the living body, and is of great significance to human life and biological survival. The precise measurement of the magnetic field plays an important role in materials science, physics, biology, aerospace, geophysics, space science and other fields, such as geomagnetic environment detection, navigation, defense anti-submarine, mineral detection, electronic component detection, biomedicine Wait. Magnetometer is a conventional instrument for satellite magnetic detection and ground magnetic field observation, and its advanced performance is related to the realization of scientific goals. The fluxgate sensor has the characteristics of high resolution, high measurement range, high reliability, and the ability to directly measure magnetic field components, and has always been one of the ...
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Login to View More IPC IPC(8): G01R33/05
CPCG01R33/05
Inventor 唐衡曹馨李翠红王磊王开天杜爱民冯晓孙树全
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI