High-throughput chemical vapor infiltration process, application and device based on parameter area control

Abstract

The invention discloses a high-throughput chemical vapor infiltration process based on parameter regional control, application thereof and a device adopting the same. The high-throughput chemical vapor infiltration process based on parameter region control comprises the following steps: folded carbon paper is utilized to divide a deposition area into deposition zones with different specific areas, fiber preforms of same types and dimensions are placed in each of the deposition zones at preset deposition temperature, deposition pressure and gas flow, so that region control within the retention time is realized, and high-throughput composite materials with different parameter systems are prepared in single experiment; the deposition rate and the microstructure of the carbon paper and the fiber preforms in the deposition zones are tested and characterized, quick and efficient parameter optimization of the retention time and the specific areas is realized, deposition parameters and deposition areas with better deposition characteristic and better densification characteristic are sought out, and a series of technological parameters are selected in an optimized manner. According to the high-throughput chemical vapor infiltration process based on parameter region control, application thereof and device adopting the same, optimized deposition parameters and deposition areas in combination with area movement of large-dimension fiber preforms are utilized, and finally rapid and uniform densification of large-dimension composite material components is realized.

Description

technical field [0001] The present invention relates to a chemical vapor infiltration (Chemical Vapor Infiltration, CVI) process and device design method, in particular to a high-throughput chemical vapor infiltration process, application and device, which are applied to high-throughput composite material design and parameter optimization and The technical field of rapid and uniform densification of composite materials. Background technique [0002] The process optimization cycle of traditional CVI process for preparing composite materials is long, and usually requires a large number of repeated experiments and repeated sample characterizations through a series of different parameter systems, resulting in very high cost and low efficiency for the preparation of composite materials. Taking the preparation of SiC / BN / SiC composite materials by CVI process as an example: firstly, it is necessary to prepare a BN interface layer with good bonding strength with both fibers and subs...

AI Technical Summary

Problems solved by technology

However, because there are many factors affecting the deposition process of the BN interface layer and the SiC substrate, such as deposition temperature, residence time, deposition pressure, etc., it is necessary to design a large number of orthogonal experiments and repeat many times to optimize the deposition process simply by repeated experiments. Characterizing the sample will take a lot of time, resulting in high experimental costs. At the same time, due to weather or deposition equipment, the stability of the deposition process cannot be guaranteed, and it is difficult to determine the optimal deposition process.

For example, during the deposition of SiC substrates, the types and concentrations of gas phase components are different under different temperatures (T), different pressures (P), different specific surface areas (Sv) and residence times (τ), resulting in different SiC deposition rates at different positions. Different from the microstructure and can affect the densification process under the control of diffusion deposition

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