Alnbc/alnbcn laminated composite coating tool and its preparation process

Abstract

The invention belongs to the field of mechanically-manufactured cutting tools, in particular to a tool provided with an AlNbC / AlNbCN laminated composite coating and a preparation technique of the tool. An unbalanced magnetron sputtering and electric arc ion plating combined film plating method is adopted, an AlNbC composite target is directly used as a carbon source, the deposition temperature is controlled to be lower than 300 DEG C, and the composite coating can be prepared on cutting tools or tool base bodies more widely. According to the prepared tool provided with the AlNbC / AlNbCN laminated composite coating, the coating is deposited on the surface of a tool base body, the coating is of a laminated composite structure formed by sequentially and alternately arranging Ti transition layers, AlNbC coatings and AlNbCN coatings, and the outermost layer is an AlNbCN coating. The prepared tool provided with the AlNbC / AlNbCN laminated composite coating integrates the advantages of the AlNbC carbide coatings, the AlNbCN carbon nitride compound coatings and the laminated structure, has excellent physical and mechanical properties and can be widely applied to rough machining and finish machining of materials such as steel, stainless steel, cast iron, heat-resistant alloy and titanium alloy.

Description

technical field [0001] The invention belongs to the field of machine-made metal cutting tools, in particular to an AlNbC / AlNbCN laminated composite coating tool and a preparation process thereof. Background technique [0002] The rapid development of contemporary cutting processing technology puts forward higher requirements on the material and performance of cutting tools. Dry and high-speed cutting has become the development direction of cutting tools. Depositing a hard film on the surface of the tool has become an important way to improve and enhance the performance of the tool. TiCN is currently the most widely used ternary carbonitride hard coating, and the TiCN coating significantly improves its friction and wear properties due to the high hardness of TiC and the good toughness of TiN (Jinlong Li, Shihong Zhang, Mingxi Li. Influence of the C 2 h 2 flow rate on gradient TiCN films deposited by multi-arc ion plating[J].Applied Surface Science,2013(283):134-144.), has...

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Problems solved by technology

[0004] At present, carbon and nitrogen compounds such as TiCN are mainly prepared by techniques such as chemical vapor deposition (CVD), that is, through TiCl 4 (or Ti target), CH 4 (or C 2 h 2 ) and N 2 The deposition temperature usually exceeds 400°C, which has an adverse effect on the substrate. At the same time, the gas carbon source is easy to pollute the coating equipment, which restricts its wide application.

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