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Advanced Fluid Handling Methods and Systems
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A technology of fluid communication and material flow, applied in the direction of separation method, mixing method, mixture post-processing, etc., can solve the problems of small online mixer, variable flow control, and inability to meet strict specification requirements
Active Publication Date: 2021-07-02
FUJIFILM ELECTRONICS MATERIALS US
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However, inline mixers are small and create high back pressure
Each raw materialstream component loop to the in-line mixer creates a flow control problem that results in significant property changes
As a result, continuous processes cannot meet stringent specifications
Method used
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[0109] Summary of Examples 1, 2 and 3:
[0110] Three representative examples are shown below. These examples compare the ACP process described in this invention with conventional batch processes such as figure 2 , hereinafter also referred to as "batch process") and conventional continuous processes (such as image 3 , hereinafter also referred to as "continuous process") comparison. For each of the three examples, test results were collected over 100 production batches.
example 1
[0111] Example 1: Production Yield Experiment
[0112] Detailed study of yield analysis for ACP process, conventional batch process and conventional continuous process. The steps for these three processes are described below.
[0113] Batch process (comparison)
[0114] 100 batches of polishing compositions were prepared using a batch manufacturing process. The polishing composition contains chemicals, water and silica abrasive particles. Chemicals include carboxylic acids (Acid 2), organic bases (Base 2), and others. Such as figure 2 As shown in , for each batch, the above chemicals and water are pumped one by one from the material tanks 12, 14 and 16 to the 3000 gallon tank 20 through pumps 13a, 13b, 13c and mass flow controllers 15a, 15b, 15c (which acts as a mixing tank and storage tank). The silica abrasive dispersion is then pumped from material tank 18 into tank 20 via pump 13d and mass flow controller 15d. Tank 20 contains paddle mixer 17 which is turned on to m...
Embodiment 2
[0122] Embodiment 2: Overall product quality and production process consistency experiment
[0123] A detailed study was performed to analyze the quality of the products obtained from the three processes described in Example 1 and how process variations affect product quality. As previously described, analytical QC data / process parameters were collected for 100 batch production runs for each of the following three processes: batch, continuous, and ACP. These parameters were measured for the finished batches for the three samples. Therefore, for each manufacturing process, since there were 100 batch production runs, 300 data points were collected for any parameter. Three samples from a particular batch were taken from the initial package (eg, first cylinder), the intermediate package of the batch, and the final package of the same batch, respectively.
[0124] In general, each component in the composition has a specific electron mobility. The electron mobility of the individ...
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Abstract
The present invention provides methods of forming chemical compositions. The method comprises (1) mixing a plurality of continuous streams of material in a mixing tank to form a chemical composition, each continuous stream of material comprising at least one component of the composition; and (2) making the chemical composition The continuous flow moves to the packing station downstream of the mixing tank. Said mixing and moving steps are performed continuously. The invention also provides a system that can be used to perform the method.
Description
[0001] Cross References to Related Applications [0002] This application claims priority to US Provisional Application No. 62 / 306,795, filed March 11, 2016, the contents of which are hereby incorporated by reference in their entirety. technical field [0003] The present invention relates to continuous fluid processing methods and related systems and assemblies. Background technique [0004] Mixing is the process by which two or more substances are combined while the chemical properties of each substance remain substantially unchanged. However, the properties of the overall mixture may differ from those of the component substances. Thus, mixing is often used to produce a medium with a desired set of physical and chemical properties that can be demonstrated by analytical techniques. [0005] For example, in semiconductor manufacturing, chemical mechanical planarization / polishing (CMP) is used to flatten wafer surfaces. This process requires the use of slurries containing ...
Claims
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