Method for preparing nodular micro-nano metal cone through electricity chemistry corrosion

Abstract

The invention provides a low-cost high-efficiency machining method capable of machining symmetric multi-node micro-nano metal cone structures. According to the method, the core experiment principle is electricity chemistry corrosion. Under precise control of a precision displacement table, the corrosion time of each portion is controlled and is from long to short, corrosion is carried out from deep to shallow, and finally linear and non-linear metal cones with the tip end transverse radius within one micrometer are obtained. The electricity chemistry corrosion method is applied, in the aspect of micro-nano structure machining, the beneficial effects of extremely low cost and extremely high manufacturing efficiency are achieved, the method can be used for manufacturing probes in scanning near field microscopes and atomic force microscopes, and the manufactured low-cost metal robes has the very high utilization value in the aspects of single molecular imaging, thermally assisted magnetic recording, nano sensing, nano imaging, nano photoetching, nano manipulation and the like.

Description

technical field [0001] The invention belongs to the field of preparation of micro-nano metal cone structures. In particular, it relates to a method for preparing a micro-nano metal cone structure by an electrochemical corrosion method, and a precision displacement platform used in the preparation method. Background technique [0002] The micro-nano metal cone structure guides the surface plasmon to propagate toward the cone tip and focuses near the metal nanocone tip, so that the electromagnetic field near the metal nanocone tip is greatly enhanced and confined within a range of tens of nanometers, so as to This method can solve many problems in the optical field, such as breaking through the optical diffraction limit and realizing high-density integration of optical paths. This plays an important role in improving the luminous efficiency of molecules, thereby improving the spatial resolution of Raman scattering and scanning near-field microscopy. Manipulation and other as...

AI Technical Summary

Problems solved by technology

[0003] At present, methods such as ion beam etching, ion implantation-assisted nanofabrication, and multiphoton nanofabrication are often used in the manufacture of micro-nano metal cone structures. However, including ion beam etching technology, they have their own operational difficulties. Large, high manufacturing cost characteristics, leading to an increase in the final device cost

For the micro-nano processing technology with electrochemical corrosion technology as the core, it has not been well applied at present.

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