Silicon-derived compound spinning nozzle and preparation method thereof
A spinneret and compound technology, which is applied in the field of MEMS processing, can solve the problems of spinneret failure, poor layer-to-layer adhesion, and poor adhesion between the spinneret and the metal substrate, and achieves easy mass production. Effect
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[0054] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention. figure 1 A schematic flow diagram of the preparation method of the silicon derivative compound spinneret provided by the present invention, as figure 1 Shown, method among the present invention can comprise:
[0055] S101. According to a preset pattern, make a spinneret body with silicon material, and the spinneret body has at least one spinneret hole.
[0056] The invention can adopt the integrated circuit chip manufacturing process, the laser ablation process and the mold pouring process to manufacture...
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