Stress-adjustable graphene film optical fiber Fabry-Perot resonator and manufacturing method thereof

Abstract

The invention discloses a stress-adjustable graphene film optical fiber Fabry-Perot resonator and a manufacturing method thereof. The resonator takes a graphene film as a resonance sensitive material, an optical fiber positioning cap is fabricated by using an SU-8 photoresist, and a Fabry-Perot interference cavity is formed by the end face an optical fiber and the graphene film adsorbed on the end face of the optical fiber positioning cap. The manufacturing method combines an MEMS micromachining technology and a near ultraviolet photoetching technology, and comprises the steps of firstly spinning PDMS between a silicon oxide substrate and a deformation controllable substrate layer to act as a release layer so as to enable the separation of the substrate layer and the silicon substrate to be easier; then spinning the SU-8 photoresist at the other side of the fabricated stress-regulating substrate layer, and fabricating a positioning cap with a stepped cylindrical internal structure through a photoetching technology so as to achieve importing and positioning of the optical fiber; and finally, bonding and packaging the inserted optical fiber and the positioning cap through epoxy resin glue. The resonator prepared according to the invention has the advantages of novel structure, small volume, adjustable film stress and the like.

Description

technical field [0001] The invention relates to the technical field of resonators and optical fiber sensing, in particular to a graphene film optical fiber F-Per resonator capable of stress regulation and a manufacturing method thereof. Background technique [0002] In recent years, graphene, a new type of two-dimensional planar nanomaterial, has become a high-profile international research frontier and hotspot, bringing new breakthroughs to the bottleneck problem encountered by traditional micro-resonators due to material limitations. [0003] Graphene is the thinnest material known so far, and its single-layer thickness is as small as the diameter of a carbon atom, only 0.335nm (see: Novoselov K S, Geim A K, Morozov S V, et al. Electric field effect in atomically thin carbon films [J].Science,2004,306(5696):666-669.), but still maintain a high crystallization order, which makes graphene have superior material properties such as small thickness, large specific surface area ...

AI Technical Summary

Problems solved by technology

In short, the research on the use of new material graphene for resonators at home and abroad is still in the stage of theoretical simulation and characteristic experiments, and the initial stress of the fabricated resonators cannot be adjusted, which limits the performance of graphene microresonators to a certain extent. Dynamic improvement and device optimization may even cause some microresonators to fail and become unusable

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