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Manufacturing method of optical window structure adopting hermetic packaging of sapphire lens and kovar

A manufacturing method, sapphire technology, is applied in the field of light window structure manufacturing of sapphire lens and Kovar alloy airtight package, which can solve the problem that the airtightness and firmness cannot be well realized, and the airtightness of the sealing parts is affected. Reliability, affecting the service life of sealing parts and other issues, to achieve the effect of easy surface finish, easier realization of welding process, and good processing and forming performance

Inactive Publication Date: 2017-12-29
HUIZHOU JINHENG IND MOLD DESIGN PARTNERSHIP ENTERPRISE GENERAL PARTNERSHIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Both of these connection methods cannot be well realized in terms of airtightness and firmness
If the bonding method cannot exceed high temperature, and the phenomenon of aging is serious, this seriously affects the service life of the sealing parts
However, the airtightness of the mechanical connection is not good, especially when the screw holes need to be processed, it is easy to cause cracks in the window, which affects the airtightness and reliability of the sealing parts

Method used

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  • Manufacturing method of optical window structure adopting hermetic packaging of sapphire lens and kovar
  • Manufacturing method of optical window structure adopting hermetic packaging of sapphire lens and kovar
  • Manufacturing method of optical window structure adopting hermetic packaging of sapphire lens and kovar

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Embodiment 1: A method for manufacturing a light window structure of a sapphire lens and a Kovar alloy hermetic package, comprising the following steps: (the glass solder model described in this embodiment is Mansol (L13))

[0025] (1) Sapphire lens with convex grooves: the sapphire is subjected to a series of processing such as slicing and grinding to form convex grooves around it, and polished with polishing powder to form a transparent surface.

[0026] (2) Metal molded parts with grooves: Kovar metal is molded so that a groove is formed at the seal, and the groove can be engaged with the convex groove of the sapphire lens.

[0027] (3) Pretreatment of sapphire lens sealing: cleaning, wiping and drying.

[0028] (4) Pre-sealing treatment of metal forming parts: cleaning, wiping, drying, pre-oxidation.

[0029] (5) Sealing: Clamp the solder to the groove of the metal molding with tweezers, place the sapphire window on the solder, make the convex groove of the sapphir...

Embodiment 2

[0035] Embodiment 2: Welding effect evaluation of sapphire lens and Kovar alloy sealing

[0036] After sealing, observe the surface solder overflow condition, degree of crystallinity, and color layering of the sample under a microscope to judge the effect of welding: (the experimental object is obtained from the sealing process of Example 1, and the only variable is whether to set convex grooves)

[0037] Table 2 Whether to set the convex groove test data in the welding area

[0038]

[0039] It can be seen under the microscope that if the solder overflows, it means that the solder has completely melted and has reached the melting point of the solder. The crystalline area is calculated as the percentage of the crystalline area in the entire welding area as 100% of the entire welding surface. The higher the degree of crystallinity, the better the effect of solder welding. The color stratification indicates the uniformity of the solder after soldering. If the stratification...

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Abstract

The invention discloses a manufacturing method of an optical window structure adopting hermetic packaging of a sapphire lens and kovar. The method comprises treatment before sealing of the sapphire lens: cleaning, wiping and drying are performed; peroxidation treatment before sealing of a metal formed part: the metal formed part is put in a sintering furnace heated to 700 DEG C to be oxidized and kept at the constant temperature for 10 min after being cleaned, wiped and dried, an oxidation film is formed, and then the metal formed part is taken out; convex grooves of the sapphire lens and concave grooves of the metal formed part are subjected to meshed welding through solder; sintering is performed in the sintering furnace. The convex grooves of the sapphire lens and the concave grooves of the metal formed part are subjected to meshed welding through solder, so that the yield is effectively increased, a welded part is more firmly welded, and the sealing property is improved.

Description

technical field [0001] The invention belongs to the field of optoelectronic hermetic packaging, in particular to a method for manufacturing a light window structure of a sapphire lens and a kovar alloy hermetic packaging. Background technique [0002] As an important part of MOEMS technology, the sealing technology of optoelectronic devices affects the application and development of optoelectronic devices. Optical window is one of the main packaging forms of optoelectronic devices, which has always been paid attention to by scientific research. New technologies are continuously introduced into the production practice of optical windows, hoping to meet the requirements of reducing production costs, improving the performance of optoelectronic devices, and forming a unified industrial production method and standard. [0003] In the field of optoelectronic hermetic packaging, there is a type of product that is made of crystal materials such as CaF2, MgF2, quartz crystal, ZnS an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C27/04
Inventor 不公告发明人
Owner HUIZHOU JINHENG IND MOLD DESIGN PARTNERSHIP ENTERPRISE GENERAL PARTNERSHIP
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