A kind of metal and crystal hermetically encapsulated light window structure manufacturing method

Abstract

The invention discloses a manufacture method of a metal and crystal hermetically sealed light window structure. The manufacture method comprises the steps of: (1) a metal molding with a cavity: removing oil and rinsing, plating nickel, and drying; (2) partial treatment of a crystal lens: masking, corroding and roughening chemically, polarizing a roughened position, plating nickel chemically, electrotinning, drying, cutting and slicing; (3) a jig: processing the jig according to component size precision; (4) sealing: putting the metal molding and the crystal lens on the jig, and baking for 15-20 minutes at 250-300 DEG C in a sintering furnace so as to form a finished product; and (5) testing: testing the binding strength and hermeticity of the finished product. According to the manufacture method, the crystal lens is masked locally, corroded and roughened and electroplated so as to form a metal transition layer, and then a crystal light window and a hose cap or cavity of the metal molding are soldered at low temperature so as to realize hermetical sealing, so that multiple technological difficulties caused by matching of material expansion coefficients are resolved effectively.

Description

technical field [0001] The invention belongs to the field of optoelectronic hermetic packaging, in particular to a method for manufacturing a light window structure of metal and crystal hermetic packaging. Background technique [0002] In the field of optoelectronic hermetic packaging, there is a type of product that is made of crystal materials such as CaF2, MgF2, quartz crystal, ZnS and other crystal materials. Optical lenses or lenses need to be combined with metal tube caps or metal cavities to form an air-tight Hermetically encapsulated light window structure. Due to the sensitivity of semiconductor chips to environmental moisture, harmful gases and pollutants, such devices often require hermetic packaging. In the ultraviolet and mid-infrared regions, conventional optical glass materials are often limited due to their optical properties. Therefore, in the ultraviolet region, quartz glass is usually used as the light-transmitting material; in the mid-infrared region, va...

AI Technical Summary

Problems solved by technology

[0003] Since the expansion coefficient of quartz glass is an order of magnitude lower than that of metal materials, non-oxide crystal materials are often difficult to complete by direct sealing of glass due to relatively low phase transition temperature or various thermal expansion coefficients, so the current main The solution is to use organic adhesive (such as epoxy resin) to combine, and organic adhesive is not resistant to high temperature, easy to age and cannot reach the level of vacuum airtightness, thus reducing the reliability and service life of packaging components. usually shorter

Images