Roll-to-roll device used for continuous growing of two-dimension materials on strip/wire material and control method of roll-to-roll device

A two-dimensional material, roll-to-roll technology, applied in metal material coating process, gaseous chemical plating, plating of superimposed layers, etc., can solve problems such as no research given

Active Publication Date: 2018-01-09
INST OF PROCESS ENG CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, for the process of continuous growth of two-dimensional materials, the state of the growth substrate is very important, but which state of the growth substrate plays a key factor for continuous growth, and those skilled in the art have not given any research

Method used

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  • Roll-to-roll device used for continuous growing of two-dimension materials on strip/wire material and control method of roll-to-roll device
  • Roll-to-roll device used for continuous growing of two-dimension materials on strip/wire material and control method of roll-to-roll device
  • Roll-to-roll device used for continuous growing of two-dimension materials on strip/wire material and control method of roll-to-roll device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0123] A device for continuous growth of two-dimensional materials on tape / wire, such as figure 2 As shown, a roll-to-roll device is included, and the rotation of the first winding roll 100 and the second winding roll 200 enables the tape / wire 300 to be transferred between the two winding rolls;

[0124] Starting from the first winding roll 100, a first cooling chamber 801, a magnetron sputtering unit 900, a two-dimensional material growth chamber 700, a second cooling chamber 802, and a second winding roll 200 are arranged in sequence; and the belt / The wire 300 sequentially passes through the first cooling chamber 801, the magnetron sputtering unit 900, the two-dimensional material growth chamber 700, the second cooling chamber 802, and finally winds up on the second winding roller 200;

[0125] Between the first winding roll 100 and the first cooling chamber 801, a first speed test roll 411 and a first tension test roll 421 are arranged, and the first speed test roll 411 a...

Embodiment 2

[0148] The difference from Example 1 is that the copper strip is 20 μm thick, 0.1 m wide, and 1000 m long. Step (2) is to start the two-dimensional material growth chamber 700, and wait until the internal vacuum degree of the two-dimensional material growth chamber 700 reaches 1×10 -3 Torr, feed CH at a flow rate of 100 sccm 4 Carbon source, 100sccm flow rate into H 2 , be warming up to 1000 ℃ of temperature; Step (3) is that 15N and moving speed are 30cm / min for inputting setting tension to control unit 500, start the first winding roller 100 and the second winding roller 200, make copper strip from the first A winding roll 100 is transferred to a second winding roll 200, while chemical vapor deposition of graphene on the copper strip is performed.

[0149] Performance Testing:

[0150] Select the performance testing method identical with embodiment 1, test result shows, every 70m take points, get 14 points altogether, carry out Raman spectrum scanning, Raman spectrum figur...

Embodiment 3

[0152] Step (1)~step (3) are identical with embodiment 1, carry out following steps after step (3):

[0153] (4) After the copper strip is transferred from the first winding roll 100 to the second winding roll 200, stop the operation of the equipment to obtain a copper strip deposited with one layer of graphene;

[0154] (5) Start the magnetron sputtering unit 900, wait for the vacuum inside the magnetron sputtering unit 900 to reach 1×10-6Torr, feed argon gas at a speed of 500 sccm, and heat up to a temperature of 200° C., the magnetron sputtering unit 900 The sputtering target is a copper target;

[0155] (6) input setting tension to control unit 500 as 8N and moving speed as 15cm / min, start the first winding roller 100 and the second winding roller 200, make the copper strip transfer from the second winding roller 200 to the first winding roller Winding roller 100, carry out magnetron sputtering copper thin film on the graphene surface on the copper strip of growth graphen...

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Abstract

The invention relates to a roll-to-roll device used for continuous growing of two-dimension materials on a strip / wire material. The roll-to-roll device comprises a first winding roller, a second winding roller, a monitoring unit and a control unit Through rotation of the first winding roller and the second winding roller, the strip / wire material can be transferred between the two winding rollers.The monitoring unit is used for monitoring state parameters of the strip / wire material between the first winding roller and the second winding roller. The control unit is used for controlling the rotation speed of the first winding roller and / or the second winding roller according to state parameters detected by the monitoring unit. According to the roll-to-roll device, through monitoring of the state parameters including speed and tension in the strip / wire material conveying process, the strip / wire material stable transferring state parameters are set, and accordingly the purpose of uniform and continuous deposition of the two-dimension materials is achieved.

Description

technical field [0001] The present invention relates to the technical field of growth of two-dimensional atomic crystal materials, in particular to a roll-to-roll device for continuous growth of two-dimensional materials on strips / wires, a control method thereof, equipment including the same, a method of use thereof, and a prepared 2D materials. Background technique [0002] A two-dimensional atomic crystal refers to a two-dimensional material with a thickness of only one or several atoms. In essence, it is more like a huge two-dimensional molecule. This material has amazing properties because of its absolute two-dimensional structure Unexpected features and functions. Typical two-dimensional atomic crystal materials include graphene materials, boron nitride materials, etc. Graphene is a two-dimensional material with a hexagonal honeycomb lattice composed of carbon atoms with sp2 hybrid orbitals, and only one carbon atom thick; hexagonal boron nitride (BN) and graphite are...

Claims

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Application Information

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IPC IPC(8): C23C16/54C23C16/52C23C14/56C23C14/54C23C14/35C23C28/00
Inventor 王钰顾伟
Owner INST OF PROCESS ENG CHINESE ACAD OF SCI
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