A kind of back contact type black silicon cell and preparation method thereof
A back-contact, black silicon technology, used in circuits, electrical components, photovoltaic power generation, etc., can solve the problem of low open circuit voltage of black silicon cells, achieve good self-passivation, avoid photolithography and etching processes, and broaden the spectrum. effect of response
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[0036] The following examples are used to illustrate the present invention, but not to limit the present invention.
[0037] 1. Raw material and formula
[0038] Substrate: Polished on both sides, resistivity 10Ωcm, volume 10×10×0.2mm 3 CZ monocrystalline silicon wafer, n-type, Suzhou Ruicai Semiconductor Co., Ltd.;
[0039] Upper passivation layer: silicon dioxide particles, size 1-5mm, purity 99.999%, Zhongnuo New Material Technology Co., Ltd.;
[0040] Black silicon corrosion induction material: high-purity silver particles, size 1mm, purity 99.999%, Zhongnuo New Material Technology Co., Ltd.;
[0041] Back electrode: silver paste, purity 99.999%, Zhongnuo New Material Technology Co., Ltd.;
[0042] PN junction diffusion template: 10×10cm interdigitated solid-state diffusion source, Institute of Microelectronics, Chinese Academy of Sciences
[0043] APM (SC-1) cleaning solution: NH 4 OH / H 2 o 2 / H 2 O (50ml / 50ml / 50ml) mixed solution;
[0044] Texturing solution: N...
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