Tungsten probe composite diamond-like coating layer and preparation method thereof

A diamond coating and composite technology, which is applied in metal material coating process, coating, superimposed layer plating, etc. problems, to achieve good support and interface combination, good application value, and overcome the effects of high internal stress

Active Publication Date: 2018-01-16
GUANGDONG NAISENSE COATING TECH LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] 1. The bonding force between the diamond-like coating and the substrate surface of stainless steel, aluminum alloy, titanium alloy, copper and ceramics is poor, and it is easy to fall off and fail under wear or corrosion conditions;
[0005] 2. The diamond-like carbon coatings obtained by various preparation methods generally have high internal stress (sometimes as high as 10GPa). When the coating reaches a certain thickness, the large compressive stress makes the coating prone to cracking and peeling, which limits the diamond-like carbon coating. Coating Deposition Thickness

Method used

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  • Tungsten probe composite diamond-like coating layer and preparation method thereof

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Embodiment Construction

[0019] The present invention will be described in further detail below in conjunction with the examples.

[0020] like figure 1 As shown, a tungsten probe composite diamond-like carbon coating is characterized in that: the coating is sequentially composed of a tungsten probe substrate 1, a bottom layer adhesive layer 2 and a surface layer 3, and the bottom layer adhesive layer 2 is made of metal titanium ( Ti) layer, the surface layer 3 is a composite diamond coating.

[0021] The thickness of the bottom adhesive layer 2 is 0.3-0.5 microns; the thickness of the surface layer 3 is 0.8-1.2 microns.

[0022] A method for preparing a tungsten probe composite diamond-like carbon coating, which is characterized in that: the tungsten probe after conventional pretreatment is placed in a cathode filtering arc-ion source-magnetron sputtering composite vapor deposition vacuum system, and sequentially deposited The following multilayer gradient films:

[0023] (1) Magnetron sputtering ...

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Abstract

The invention discloses a tungsten probe composite diamond-like coating layer; the coating layer is composed of a tungsten probe matrix, a bottom adhesive layer and a surface layer in sequence, the bottom adhesive layer is metal titanium, and the surface layer is a diamond-like coating layer. The preparation method adopts a negative electrode filter electric arc technology, an ion beam technologyand a vacuum sputtering technology are combined, the composite diamond-like coating layer is deposited on a sample substrate, and the obtained composite diamond-like coating layer has the advantages of high film-substrate bonding strength, low internal stress, low friction coefficient, good uniformity and long wear resistance.

Description

technical field [0001] The invention relates to a diamond-like coating, in particular to a tungsten probe composite diamond-like coating and a preparation method thereof. Background technique [0002] Due to its high hardness, ultra-low friction coefficient, high wear resistance and corrosion resistance, diamond-like carbon coatings show broad application prospects in the fields of machinery, electronics, and biomedicine. However, DLC coatings also have their own shortcomings, which limit their application. [0003] At present, the main problems that plague researchers in the preparation of composite diamond-like carbon coatings are: [0004] 1. The bonding force between the diamond-like carbon coating and the surface of the sample substrate such as stainless steel, aluminum alloy, titanium alloy, copper and ceramics is poor, and it is easy to fall off and fail under wear or corrosion conditions; [0005] 2. Diamond-like coatings obtained by various preparation methods gen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00C23C14/35C23C14/32C23C14/16C23C14/06
Inventor 黄裕祥李标章
Owner GUANGDONG NAISENSE COATING TECH LTD
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