Tungsten probe composite diamond-like coating layer and preparation method thereof

Abstract

The invention discloses a tungsten probe composite diamond-like coating layer; the coating layer is composed of a tungsten probe matrix, a bottom adhesive layer and a surface layer in sequence, the bottom adhesive layer is metal titanium, and the surface layer is a diamond-like coating layer. The preparation method adopts a negative electrode filter electric arc technology, an ion beam technologyand a vacuum sputtering technology are combined, the composite diamond-like coating layer is deposited on a sample substrate, and the obtained composite diamond-like coating layer has the advantages of high film-substrate bonding strength, low internal stress, low friction coefficient, good uniformity and long wear resistance.

Description

technical field [0001] The invention relates to a diamond-like coating, in particular to a tungsten probe composite diamond-like coating and a preparation method thereof. Background technique [0002] Due to its high hardness, ultra-low friction coefficient, high wear resistance and corrosion resistance, diamond-like carbon coatings show broad application prospects in the fields of machinery, electronics, and biomedicine. However, DLC coatings also have their own shortcomings, which limit their application. [0003] At present, the main problems that plague researchers in the preparation of composite diamond-like carbon coatings are: [0004] 1. The bonding force between the diamond-like carbon coating and the surface of the sample substrate such as stainless steel, aluminum alloy, titanium alloy, copper and ceramics is poor, and it is easy to fall off and fail under wear or corrosion conditions; [0005] 2. Diamond-like coatings obtained by various preparation methods gen...

AI Technical Summary

Problems solved by technology

[0004] 1. The bonding force between the diamond-like coating and the substrate surface of stainless steel, aluminum alloy, titanium alloy, copper and ceramics is poor, and it is easy to fall off and fail under wear or corrosion conditions;

[0005] 2. The diamond-like carbon coatings obtained by various preparation methods generally have high internal stress (sometimes as high as 10GPa). When the coating reaches a certain thickness, the large compressive stress makes the coating prone to cracking and peeling, which limits the diamond-like carbon coating. Coating Deposition Thickness

Images