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Treatment method of black lithium niobate wafer

A technology of blackening lithium niobate and a processing method, which is applied in the field of crystal materials, can solve the problems of reducing the yield of devices, affecting the quality of lithography, and reducing the precision of lithography, so as to improve the yield of products, have strong operability, and improve electrical conductivity. rate effect

Inactive Publication Date: 2018-01-19
CETC DEQING HUAYING ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the electrostatic field is high enough, the release of electrostatic charge will easily damage the wafer (such as cracks, cracks, etc.), and burn the interdigital electrodes. The higher the frequency of the device, the thinner the paper strip, the easier it is to burn the surface electrodes of the wafer, and reduce the yield of the device.
[0004] In addition, the unblackened lithium tantalate wafer has high transmittance. When performing photolithography, the light transmittance of the material causes partial diffuse reflection on the back of the wafer, thereby reducing the precision of photolithography and affecting the quality of photolithography.

Method used

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  • Treatment method of black lithium niobate wafer
  • Treatment method of black lithium niobate wafer
  • Treatment method of black lithium niobate wafer

Examples

Experimental program
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Effect test

Embodiment 1

[0020] Place the lithium tantalate wafer into a suitable size quartz wafer box and put it into the blackening furnace. Put the lithium compound and silicone oil in a corundum crucible at a weight ratio of 5:1 and place it in a blackening furnace. Close the furnace door, evacuate to below 500pa, raise the furnace temperature from room temperature to 500 degrees in 10 hours, and keep it warm for 4 hours. Then cool down to room temperature, inflate and open the furnace door to take out the lithium tantalate wafer. Such as figure 1 As shown, the color of the chip is light gray, and the resistivity is 10 12 Ω. cm order of magnitude.

Embodiment 2

[0022] Place the lithium tantalate wafer into a suitable size quartz wafer box and put it into the blackening furnace. Put the lithium compound and silicone oil in a corundum crucible at a weight ratio of 2:1 and place it in a blackening furnace. Close the furnace door, evacuate to below 1000pa, raise the furnace temperature from room temperature to 580 degrees in 15 hours, and keep it warm for 4 hours. Then cool down to room temperature, inflate and open the furnace door to take out the lithium tantalate wafer. Such as image 3 As shown, the color of the chip is dark black, and the resistivity is 10 9 Ω. cm order of magnitude.

Embodiment 3

[0024] Place the lithium niobate wafer into a suitable size quartz wafer box and put it into the blackening furnace. Put the lithium compound and silicone oil in a corundum crucible at a weight ratio of 5:1 and place it in a blackening furnace. Close the furnace door, evacuate to below 500pa, raise the furnace temperature from room temperature to 520 degrees in 10 hours, and keep it warm for 6 hours. Then cool down to room temperature, inflate and open the furnace door to take out the lithium niobate wafer. Such as figure 2 As shown, the chip is dark brown and the resistivity is 10 11 Ω. cm order of magnitude.

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Abstract

The invention aims to provide a treatment method of a black lithium niobate wafer and relates to a technological method for treating the lithium niobate wafer at the high temperature (Curie temperature or lower) under the condition of oxygen-free and lithium-rich concentration atmosphere. According to the technological method, conductivity of the wafer can be improved, surface charges produced dueto temperature change are eliminated rapidly, charge accumulation is avoided, and pyroelectric effect is weakened.

Description

technical field [0001] The invention belongs to the technical field of crystal materials, and in particular relates to a method for processing blackened lithium niobate wafers. Background technique [0002] Lithium tantalate and lithium niobate crystals are widely used piezoelectric crystals. The molecular formula of lithium tantalate is LiTaO 3 LT for short, density 7.46, Mohs hardness 5.5, lithium niobate molecular formula LiNbO 3 Density 4.64, Mohs hardness 5, all belong to the trigonal crystal system 3m, a typical multifunctional material, integrating various excellent properties such as piezoelectric, ferroelectric, pyroelectric, acousto-optic, electro-optic, nonlinear and photorefractive . The large piezoelectric coefficients of LT and LN crystals can make surface acoustic wave filters (SAW) with low insertion loss, but the high light transmission and high pyroelectric properties also bring a lot of inconvenience to the manufacturing process of SAW devices. Especial...

Claims

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Application Information

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IPC IPC(8): C30B31/02C30B29/30
Inventor 崔坤李勇宋松宋伟温旭杰朱卫俊王祥邦徐慧琴施旭霞
Owner CETC DEQING HUAYING ELECTRONICS
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