Unlock instant, AI-driven research and patent intelligence for your innovation.

Preparation method of soi microring photonic biosensor based on one-dimensional photonic crystal

A dimensional photonic crystal and biosensor technology, applied in the field of optical biochemical sensing, can solve problems such as low etching rate, achieve the effects of simple equipment requirements, improved sensing performance, and small detection limit

Active Publication Date: 2020-11-10
UNIV OF ELECTRONICS SCI & TECH OF CHINA
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with wet etching, this method has a lower etching rate, but it can achieve good control over the etching process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of soi microring photonic biosensor based on one-dimensional photonic crystal
  • Preparation method of soi microring photonic biosensor based on one-dimensional photonic crystal
  • Preparation method of soi microring photonic biosensor based on one-dimensional photonic crystal

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] A method for preparing a SOI microring photonic biosensor based on a one-dimensional photonic crystal, comprising the following steps:

[0047] S1, pretreatment, cleaning the SOI sample; specifically includes the following sub-steps:

[0048] S11. Put the SOI sample blown with nitrogen into an acetone solution, clean it with ultrasonic waves for 5 minutes, and then dry it with nitrogen;

[0049] S12. Put the SOI sample treated in step S11 into Piranha solution for cleaning for 10 minutes, rinse with DI water, and then dry with nitrogen;

[0050] S13. Put the SOI sample treated in step S12 into HF solution for cleaning for 15 s, rinse with DI water, and then dry with nitrogen gas;

[0051] S2, pre-baking, pre-baking the pre-treated SOI sample in a thermostat at 180°C for 2 minutes, and then cooling to room temperature;

[0052] S3, glue coating, apply photoresist on the pre-baked SOI sample by spin coating; the specific operation method is: first spin coating at a spee...

Embodiment 2

[0059] A method for preparing a SOI microring photonic biosensor based on a one-dimensional photonic crystal, comprising the following steps:

[0060] S1, pretreatment, cleaning the SOI sample; specifically includes the following sub-steps:

[0061] S11. Put the SOI sample blown with nitrogen into an acetone solution, clean it with ultrasonic waves for 8 minutes, and then dry it with nitrogen;

[0062] S12, putting the SOI sample treated in step S11 into Piranha solution for cleaning for 12 minutes, rinsing with DI water, and then drying with nitrogen;

[0063] S13. Put the SOI sample treated in step S12 into HF solution for cleaning for 18 seconds, rinse with DI water, and then dry with nitrogen gas;

[0064] S2, pre-baking, pre-baking the pre-treated SOI sample in a thermostat at 180°C for 3 minutes, and then cooling to room temperature;

[0065] S3, glue coating, apply photoresist on the pre-baked SOI sample by spin coating; the specific operation method is: first spin co...

Embodiment 3

[0072] A method for preparing a SOI microring photonic biosensor based on a one-dimensional photonic crystal, comprising the following steps:

[0073] S1, pretreatment, cleaning the SOI sample; specifically includes the following sub-steps:

[0074] S11. Put the SOI sample blown by nitrogen into an acetone solution, clean it with ultrasonic waves for 10 minutes, and then dry it with nitrogen;

[0075] S12. Put the SOI sample treated in step S11 into Piranha solution for cleaning for 15 minutes, rinse with DI water, and then dry with nitrogen;

[0076] S13, putting the SOI sample treated in step S12 into the HF solution for cleaning for 20 seconds, rinsing with DI water, and then drying with nitrogen;

[0077] S2, pre-baking, pre-baking the pre-treated SOI sample in a thermostat at 180°C for 5 minutes, and then cooling to room temperature;

[0078] S3, glue coating, apply photoresist on the pre-baked SOI sample by spin coating; the specific operation method is: first spin coa...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
depthaaaaaaaaaa
Login to View More

Abstract

The invention discloses a method for preparing a SOI microring photon biosensor based on a one-dimensional photonic crystal, comprising the following steps: S1, cleaning the SOI sample; S2, placing the pretreated SOI sample in a constant temperature box at 170-200°C Pre-baking for 2 to 5 minutes; S3, coating the photoresist by spin coating; S4, placing the sample in a constant temperature oven at a temperature of 170 to 200°C for 10 to 15 minutes; S5, exposing the sample to an electron beam, electron beam The exposure pattern is an SOI microring resonator based on one-dimensional photonic crystal; S6, develop and fix the exposed sample in sequence; S7, use ICP to etch the sample; S8, perform etching on the sample after etching cleaning. The SOI microring photon biosensor produced by the preparation method of the invention has the characteristics of high sensitivity, small detection limit, easy integration and the like, and helps to improve the sensing performance of the optical biosensor. The preparation method of the invention requires simple equipment and is easy to realize in technology.

Description

technical field [0001] The invention belongs to the technical field of optical biochemical sensing, and in particular relates to a method for preparing a SOI microring photon biosensor based on a one-dimensional photonic crystal. Background technique [0002] The currently applied biochemical sensors include heat, quantity, electricity, and light in terms of their detection mechanisms. Among them, the optical biochemical sensors with light as the detection mechanism, because compared with other types of biochemical sensors, optical biochemical sensors have non-destructive properties. With many advantages such as high sensitivity, high sensitivity, and fast response, optical biochemical sensors have been widely used and become an important part of today's optical sensor devices, and are widely used in civilian and military fields. [0003] At present, SOI optical biochemical sensors are research hotspots in this field, and the optical waveguide structures of SOI optical bioch...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/00
CPCG01N21/00
Inventor 王卓然袁国慧管磊彭芳草彭真明
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA