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AlCrSiN/VSiN multi-layer nano-coating and preparation method thereof

A nano-multilayer and coating technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of poor bonding force, large friction coefficient, and decreased hardness.

Active Publication Date: 2018-02-27
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In summary, the AlCrN-based hard coatings in the prior art still have technical problems such as high-temperature oxidation, poor bonding force, decreased hardness, and large friction coefficient under high-temperature service environments.

Method used

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  • AlCrSiN/VSiN multi-layer nano-coating and preparation method thereof
  • AlCrSiN/VSiN multi-layer nano-coating and preparation method thereof
  • AlCrSiN/VSiN multi-layer nano-coating and preparation method thereof

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preparation example Construction

[0039] The invention provides a method for preparing an AlCrSiN / VSiN nanometer multilayer coating, comprising the following steps:

[0040] a) Depositing Al on the substrate surface using cathodic arc evaporation 50 Cr 50 N transition layer;

[0041] b) Using a high-power pulsed magnetron power supply to sputter the VSi target, and using a DC arc power supply to evaporate the AlCrSi target at the cathode, in Ar gas and N 2 AlCrSiN / VSiN nanometer multi-layer coatings were reactively deposited in a mixed atmosphere of gas.

[0042] The present invention first uses cathodic arc evaporation to deposit Al on the surface of the substrate 50 Cr 50 N transition layer. In the present invention, there is no special limitation on the type and source of the substrate, and a cemented carbide substrate well known to those skilled in the art can be used. In a preferred embodiment of the present invention, the substrate is a WC-Co cemented carbide substrate.

[0043] In the present inv...

Embodiment 1

[0076] (1) Substrate pretreatment:

[0077] After the substrate is mechanically ground and polished, it is cleaned with a solvent; the specific process of the solvent cleaning is as follows: first use isopropanol to ultrasonically clean for 10 minutes, then use 98% alcohol solution to ultrasonically clean for 10 minutes, and then use an ultrasonic Ultrasonic cleaning with pure water for 3 minutes; followed by ion source bombardment cleaning treatment: use Hall ion source to clean the substrate for 5 minutes to obtain the pretreated substrate; wherein, the ambient pressure of the ion source bombardment cleaning treatment is 2.2×10 -2 Pa, the Ar gas flow rate is 50 sccm, and the substrate bias voltage is -150V.

[0078] (2) Deposit Al on the pretreated substrate surface obtained in step (1) using cathodic arc evaporation 50 Cr 50 N transition layer:

[0079] Heat the working temperature of the deposition chamber to 350°C-400°C, heat the substrate to 400°C-450°C, and extract t...

Embodiment 2

[0083] (1) Substrate pretreatment:

[0084] With embodiment 1.

[0085] (2) Deposit Al on the pretreated substrate surface obtained in step (1) using cathodic arc evaporation 50 Cr 50 N transition layer:

[0086] With embodiment 1.

[0087] (3) Use a high-power pulsed magnetron power supply to sputter the VSi target, use a DC arc power supply to evaporate the AlCrSi target, and use Ar gas and N 2 Reactive deposition of AlCrSiN / VSiN nano-multilayer coating in a mixed atmosphere of gas:

[0088] in Al 50 Cr 50 After the deposition of the N transition layer is completed, maintain the temperature of the chamber at 350°C and the temperature of the substrate at 350°C to 400°C. 2 gas, adjust the flow rate so that Ar gas and N 2 The total gas flow is 80sccm~100sccm, N 2 The gas partial pressure ratio is 40% to 80%; adjust the deposition chamber pressure to 0.5Pa to 2.0Pa, open the VSi magnetron target and the AlCrSi arc target at the same time, the sputtering power of the VSi...

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Abstract

The invention provides a preparation method of an AlCrSiN / VSiN multi-layer nano-coating. The preparation method of the AlCrSiN / VSiN multi-layer nano-coating comprises the following steps that (a) cathode electric arcs are used for achieving evaporative deposition of an Al50Cr50N transition layer on the surface of a matrix; and (b) a VSi target is sputtered through a high-power pulse magnetic control power supply, a direct-current arc power supply is used for achieving cathode evaporation of an AlCrSi target, and reactive deposition of the AlCrSiN / VSiN multi-layer nano-coating is achieved in the mixed atmosphere of Ar gas and N2 gas. According to the preparation method of the AlCrSiN / VSiN multi-layer nano-coating, the electric arc ion plating technique and the high-power pulse magnetron sputtering technique are used in a quasi coupling mode, so that the element V is prevented from being diffused outwards rapidly through a multi-layer nanostructure and a composite nanostructure, the high-temperature mechanical performance, the high temperature resistance and the oxidization resistance of the coating are improved, and the diffusion reaction between titanium and the coating at a high temperature is restrained; and under the synergistic effect of the multi-layer nanostructure, the composite nanostructure and the doped element V, the surface of the AlCrSiN / VSiN multi-layer coating has high temperature oxidization resistance, self-lubrication performance and high abrasion resistance, and the AlCrSiN / VSiN multi-layer nano-coating which is of the multi-layer nanostructure and has high bonding force, excellent temperature resistance and self-lubrication performance is finally obtained.

Description

technical field [0001] The invention relates to the technical field of nitride coatings, in particular to an AlCrSiN / VSiN nanometer multilayer coating and a preparation method thereof. Background technique [0002] The tool withstands a high temperature rise during high-speed cutting, and excellent high-temperature performance is the key to high-speed cutting of titanium alloys by coated tools. The high-temperature oxidation initiation temperature of traditional carbon / nitride coatings such as TiC, HfC, TiN, CrN, and TiCN is below 600°C, while the heat-resistant temperature of AlCrN coatings can only reach 900-950°C. Research reports have shown that adding active elements such as Y and Hf can significantly improve the high temperature oxidation resistance and mechanical properties of AlCrN coatings. In the research of Rovere et al. (F.Rovere, P.Mayrhofer, et al., Surface and Coatings Technology, 202 (2008) 5870), after oxidation at 1000°C, 1 at.% Y of Al was added 0.54 Cr ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/35C23C14/06
Inventor 吴正涛王启民王成勇唐鹏
Owner GUANGDONG UNIV OF TECH
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