Silicon-based V-shaped groove preparation method with functions of convergence and polarization selection

A V-groove, silicon-based technology, applied in the field of data communication and active optical cable, can solve the problems of indistinguishable signal value, pulse broadening, etc., and achieve the effect of reducing loss and improving coupling efficiency

Pending Publication Date: 2018-03-20
濮阳光电产业技术研究院
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Problems solved by technology

Dispersion is mainly due to the fact that electromagnetic waves of different wavelengths propagate at different speeds in the same medium, resulting in different wavelength components of the optical signal arriving at the receiving end at different times due to the accumulation of transmission distances, resulting in pulse broadening, which makes it impossible to distinguish signals value

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  • Silicon-based V-shaped groove preparation method with functions of convergence and polarization selection
  • Silicon-based V-shaped groove preparation method with functions of convergence and polarization selection

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Embodiment Construction

[0021] Such as figure 1 Shown is a schematic structural view of a silicon-based V-groove prepared using the method provided by the present invention. The specific steps for making a silicon-based V-groove are as follows: first, select a silicon wafer, perform acetone, ethanol-ultrasonic cleaning on the selected silicon wafer, rinse with deionized water, and blow dry with nitrogen; then move the treated silicon wafer into a thermal oxidation furnace for further processing. Wet oxygen oxidation, after the oxidation is completed, move it into a thermal annealing furnace for thermal annealing; the second is to perform photolithography and development; the fourth is to use nitrogen to dry it, and then immerse it in HF aqueous solution to prepare SiO 2 Mask; finally, immerse the above-treated silicon wafer in KOH aqueous solution for wet silicon etching to prepare a silicon-based V-groove with a 45° micro-mirror. The ratio of KOH aqueous solution used is KOH:IPA:H 2 O=2:1:10.

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Abstract

The invention relates to a data communication and active optical cable, and in particular relates to a silicon-based V-shaped groove preparation method with functions of convergence and polarization selection. The silicon-based V-shaped groove preparation method with functions of convergence and polarization selection comprises the steps that a silicon-based V-shaped groove with a 45-degree micromirror is fabricated, and ICP etching is carried out on the fabricated 45-degree mirror plane of the silicon-based V-shaped groove to fabricate a grating. According to the method, silicon etching and coating methods are used to realize a silicon-based V-shaped grooved waveguide with the 45-degree micromirror to realize optical path deflection of VCSEL; the subwavelength grating is fabricated on the45-degree mirror plane of the silicon-based V-shaped groove to realize light polarization and convergence; and the silicon-based V-shaped groove made through the method increases coupling efficiencyand realizes light of high polarization states, so that the light transmitted in an optical fiber has the advantages of smaller dispersion and farther propagating.

Description

technical field [0001] The invention belongs to data communication and active optical cables, and in particular relates to a method for preparing a silicon-based V-shaped groove with functions of convergence and partial selection. Background technique [0002] The optical transceiver module is the core device of optical communication, which completes the optical-electrical / electrical-optical conversion of optical signals. It consists of two parts: the receiving part and the transmitting part. The receiving part realizes the optical-electrical conversion, and the transmitting part realizes the electrical-optical conversion. In the application of optical modules, a very important index is the transmission distance of optical modules. The transmission distance of optical modules is divided into three types: short distance, medium distance and long distance. It is generally considered that 2km and below are short distances, 10-20km are middle distances, and 30km, 40km and abov...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/122G02B6/124G02B6/136
CPCG02B6/122G02B6/124G02B6/136
Inventor 刘鹏程李明闫海涛张豪杰黄宁博王永贞
Owner 濮阳光电产业技术研究院
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