Real-time lithiation wall processing system used for improving wall conditions of plasma
A processing system and plasma technology, applied in the field of real-time lithiated wall processing systems, can solve the problems of impurity pollution, high recirculation, etc., and achieve the effect of performance improvement
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[0023] A real-time lithiated wall treatment system for improving plasma wall conditions, comprising an evaporator 1, a baffle and a control system, and a bellows transmission system, the baffle and the control system including a rotatable baffle 2, The baffle 2 is arranged at the evaporation outlet 3 of the evaporator, the rotating shaft of the baffle 2 extends through the evaporator 1 to the outer end, and the other end of the rotating shaft 4 is equipped with a linear guide 5, the linear The lower end of the introducer 5 is connected to the nitrogen cylinder 6 through a pipeline, and a solenoid valve 7 is arranged in the pipeline. The bellows transmission system includes a support tube 8, and the support tube 8 is sleeved on the rotating shaft 4 at the rear end of the evaporator. The front end of the support tube 8 communicates with the evaporator 1, the rear end of the support tube 8 is covered with a bellows 9, and the front end of the bellow...
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