High-temperature thin film strain meter of composite protection layer and preparation method thereof

Abstract

The invention relates to a high-temperature thin film strain meter of a composite protection layer and a preparation method thereof. The strain meter comprises a high-temperature alloy component substrate, an alloy transition layer, an aluminum oxide insulating layer, an aluminum oxide protection layer, an aluminum intermediate layer, a PdCr strain layer and a Pt electrode. the strain meter takesa high-temperature alloy component as a substrate, a transition layer alloy is firstly subjected to magnetron sputtering on the substrate and is subjected to high-temperature oxidation to generate a thin-layer aluminum oxide film, the aluminum oxide insulating film is deposited by double ion beam sputtering, and a PdCr strain layer is subjected to radio frequency magnetron sputtering on the insulating film, and the ion beams sputter AL intermediate layer and an AL2O3 protective layer. The strain meter is suitable for the real-time measurement of the strain of a component in the high-temperature working process, a universal MEMS patterning process is adopted, and the PDCR is sputtered to serve as a strain layer, the ion beams sputter to prepare Al and Al2O3 to obtain a composite protectionlayer by heat treatment, so that the oxidation of the PdCr thin film is prevented, and the oxidation resistance and the stability of the strain meter are improved.

Description

technical field [0001] The invention relates to the technical field of thin-film sensor design and production, in particular to a high-temperature thin-film strain gauge with low drift rate prepared in situ on a high-temperature alloy component and a preparation method thereof. Background technique [0002] With the development of space technology and nuclear industry, a large number of components are required to work in high temperature environment. For components that operate at high temperatures for a long time, for example, in modern turbine aeroengine technology, turbine blades work in extreme environments of high temperature, high pressure, and high corrosion, and their load and creep are the main factors that cause failure. The strain detection of components puts forward very high requirements. In addition, the design and material selection of turbine blades has become a crucial link in the design and manufacture of engines. In order to determine the structural mode...

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Problems solved by technology

[0004] High temperature PdCr thin film strain gage, in the process of high temperature measurement, due to the corrosion of PdCr by oxygen at high temperature, Cr will be oxidized to form chromium oxide, which will cause the resistance value to be unstable.

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