Acidic texture surface making additive used for surface treatment of diamond wire sawn polycrystalline silicon wafer, and use method of the additive
A silicon wafer surface and diamond wire technology, applied in post-processing, post-processing details, polycrystalline material growth, etc., can solve the problems of high reflectivity, poor uniformity, and large suede surface size on the silicon wafer surface, and achieve the suede surface size Small and uniform, less environmental burden, good uniformity effect
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Embodiment 1
[0011] A kind of acidic texturizing additive for the surface treatment of polycrystalline diamond wire sliced silicon wafers and its application method according to the present invention adopt the following steps:
[0012] 1) Preparation of acidic texturing additive: Dissolve 1.5g of oxalic acid, 2.5g of N-methylpyrrolidone, and 0.5g of polyethyleneimine in 100ml of deionized water;
[0013] 2) Preparation of acidic solution: 150g of hydrofluoric acid (the mass percentage of hydrofluoric acid in the hydrofluoric acid aqueous solution is 40%), 500g of nitric acid (the mass fraction of nitric acid in the nitric acid aqueous solution is 65%) and 350g of deionized water mix, stir well;
[0014] 3) Preparation of acidic texturing solution: Add 10ml of the additive in step 1) to 1L of the acidic solution in step 2);
[0015] 4) Texturing: immerse the polycrystalline diamond wire-cut silicon wafer in the acidic texturing solution in step 3), the texturing temperature is 5°C, and t...
Embodiment 2
[0017] A kind of acidic texturizing additive for the surface treatment of polycrystalline diamond wire sliced silicon wafers and its application method according to the present invention adopt the following steps:
[0018] 1) Preparation of acidic texturing additive: Dissolve 0.5g oxalic acid, 5g N-methylpyrrolidone, 1.5g vinylpyrrolidone-vinylpyridine copolymer into 100ml deionized water;
[0019] 2) Preparation of acidic solution: 200g hydrofluoric acid (the mass percentage of hydrofluoric acid in the hydrofluoric acid aqueous solution is 40%), 600g nitric acid (the mass fraction of nitric acid in the nitric acid aqueous solution is 65%) and 200g deionized water mix, stir well;
[0020] 3) Preparation of acidic texturing solution: add 20ml of the additive in step 1) to 1L of the acidic solution in step 2);
[0021] 4) Texturing: immerse the polycrystalline diamond wire-cut silicon wafer in the acidic texturing solution in step 3), the texturing temperature is 7°C, and the...
Embodiment 3
[0023] A kind of acidic texturizing additive for the surface treatment of polycrystalline diamond wire sliced silicon wafers and its application method according to the present invention adopt the following steps:
[0024] 1) Preparation of acidic texturing additive: Dissolve 5g of oxalic acid, 10g of N-methylpyrrolidone, and 1.0g of polyvinylamine into 100ml of deionized water;
[0025] 2) Preparation of acidic solution: 130g of hydrofluoric acid (the mass percentage of hydrofluoric acid in the hydrofluoric acid aqueous solution is 40%), 700g of nitric acid (the mass fraction of nitric acid in the nitric acid aqueous solution is 65%) and 270g of deionized water mix, stir well;
[0026] 3) Preparation of acidic texturing solution: add 5ml of the additive in step 1) to 1L of the acidic solution in step 2);
[0027] 4) Texturing: immerse the polycrystalline diamond wire-cut silicon wafer in the acidic texturing solution in step 3), the texturing temperature is 5°C, and the te...
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