A quantum dot structure photodetector and its preparation method
A technology of photodetectors and quantum dots, which is applied in the field of photodetectors, can solve problems such as slow response speed and large dark current, and achieve the effects of improving device performance, increasing life, and increasing light response
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[0020] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. For simplicity, some technical features known to those skilled in the art are omitted from the following description.
[0021] like image 3 As shown, the present embodiment provides a method for preparing a photodetector with a quantum dot structure, which is characterized in that it has a highly doped silicon substrate 1 covered with an aluminum oxide dielectric layer 2, comprising the following steps:
[0022] Using detergent, acetone, ethanol and deionized water to ultrasonically clean the highly doped silicon substrate 1 in sequence;
[0023] Transferring the graphene onto the alumina dielectric layer 2 to form a graphene layer 3;
[0024] Spin-coat photoresist on the graphene layer 3, photoresist off the photoresist at the posit...
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