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Preparation method of Ta-based high-temperature protection coating with self-healing function

A protective coating, self-healing technology, applied in the coating, metal material coating process, vacuum evaporation plating and other directions, can solve the problems of expensive materials, poor high temperature wear resistance, easy to fall off, etc., to achieve high bonding strength , The effect of improving the bonding strength and improving the service life

Active Publication Date: 2018-07-31
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] Most of the equipment in metallurgy, casting, petroleum and chemical industries work in high temperature environment. The surface of carbon steel is oxidized into an oxide film under high temperature conditions, which is easy to fall off, and its high temperature wear resistance is poor. Although superalloys have good corrosion resistance And wear resistance, but the price of the material is more expensive

Method used

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  • Preparation method of Ta-based high-temperature protection coating with self-healing function
  • Preparation method of Ta-based high-temperature protection coating with self-healing function
  • Preparation method of Ta-based high-temperature protection coating with self-healing function

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Embodiment 1

[0025] Step 1: Pretreatment of the substrate material. Select a #45 steel disc with a diameter of 45mm and a thickness of 1.5mm as the substrate, and use #25#200#400#600#800 sandpaper to polish and remove the rust layer and oxide layer on the surface. Polished. The obtained substrate was ultrasonically cleaned with acetone and alcohol successively, and then dried with nitrogen to obtain a clean and mirror-surfaced substrate.

[0026] Step 2: Preparation of the middle layer of the metal Ta film: high-purity Ta (99.99%) is used as the target material for the experiment, and the Ta film is pre-sputtered on the surface of the substrate by DC magnetron sputtering, and the process parameters are: background vacuum 5 *10 -3 Pa, the working pressure is 0.6Pa, the sputtering power is 60W, the Ar flow rate is 25sccm, and the sputtering time parameter is controlled to obtain a Ta film transition layer with a thickness of 500nm-2um.

[0027] Step 3: Preparation of Ta-Ag self-healing hig...

Embodiment 2

[0031] The pretreatment of the substrate material in step 1 is the same as step 1 of the embodiment.

[0032] Step 2: Preparation of the middle layer of the metal Ta film: high-purity Ta (99.99%) is used as the target material for the experiment, and the Ta film is pre-sputtered on the surface of the substrate by DC magnetron sputtering, and the process parameters are: background vacuum 5 *10 -3 Pa, the working pressure is 0.4Pa, the Ta sputtering power is 70W, the Ar flow rate is 25sccm, and the sputtering time parameters are controlled to obtain a Ta film transition layer of 500-2um.

[0033] Step 3: Preparation of Ta-Ag self-healing high-temperature protective coating; on the substrate containing the Ta interlayer obtained after step 2, the purchased high-purity Ag target and the Ta target used in step 2 are used Composite magnetron sputtering is carried out, and Ta and Ag are sputtered and deposited on the surface at the same time by DC magnetron sputtering method, so as ...

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Abstract

The invention discloses a preparation method of a Ta-based high-temperature protection coating with a self-healing function. The preparation method of the Ta-based high-temperature protection coatingwith the self-healing function comprises the steps of adopting a 99.99-percent high-pure Ta circular block material as a magnetron sputtering target material, adopting a direct-current magnetron sputtering method, pre-sputtering on a clean stainless steel substrate, preparing a layer of completely covered Ta thin film, and obtaining a Ta middle layer with an alpha phase; and selecting the 99.99-percent high-pure Ta circular block material and a high-pure Ag target material as sputtering raw materials, adopting two direct-current magnetron sputtering power supplies for independently regulatingthe two target materials, and preparing a Ta-Ag self-healing high-temperature protection layer on the Ta middle layer with the alpha phase. According to the preparation method of the Ta-based high-temperature protection coating with the self-healing function provided by the invention, the structure regulation of the self-healing layer can be realized; in a Ta-Ag composite thin film structure, Ag is dissolved into a crystal lattice of the metal Ta so as to form a super-solid solution; during the generation of high-temperature cracks, vacancies and microcracks can be filled to the vacancies through the formation of the precipitated-phase Ag so as to achieve healing; and generated tantalum oxide can form a protection layer on the surface of the thin film, so that the further oxidization is prevented.

Description

technical field [0001] The invention relates to the technical field of physical vapor deposition, and relates to a preparation method of a Ta-based high-temperature protective coating with a self-healing function. Background technique [0002] Most of the equipment in metallurgy, casting, petroleum and chemical industries work in high temperature environment. The surface of carbon steel is oxidized into an oxide film under high temperature conditions, which is easy to fall off, and its high temperature wear resistance is poor. Although superalloys have good corrosion resistance And wear resistance, but the price of the material is more expensive. Therefore, the application of surface technology to prepare coatings with high temperature corrosion resistance and wear resistance has become an economical and practical technology. The development of materials with self-healing properties has received considerable attention. In metal systems, the prospects for self-healing are n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16
CPCC23C14/165C23C14/352
Inventor 李航阿米特王俊李建亮季钰涓张夏菲
Owner NANJING UNIV OF SCI & TECH
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