Method for preparing compact AlQ3 film

A thin-film and dense technology, which is applied in the field of preparing dense AlQ3 thin films, can solve the problems of reduced device life, low vacuum degree, and device failure, and achieve stable electrical properties, good compactness, and consistent crystallization.

Inactive Publication Date: 2018-08-14
HOHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

There are two factors that directly reduce the life of the device: one is the performance of the organic material used; the other is the packaging method of the device. If the airtightness of the device is poor after packaging, the organic material will react with water vapor, oxygen and other gases, resulting in device failure. , the existing encapsulation technology is encapsulation with desiccant plus glass or encapsulation with polymer film, which has the disadvantages of low vacuum degree and complicated process

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  • Method for preparing compact AlQ3 film
  • Method for preparing compact AlQ3 film
  • Method for preparing compact AlQ3 film

Examples

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Embodiment 1

[0025] A preparation of dense AlQ 3 A thin film method comprising the steps of:

[0026] Step 1, build the device

[0027] Take the vacuum chamber, and set the boron nitride crucible in the vacuum chamber, and powdery AlQ 3 placed in a boron nitride crucible. The boron nitride crucible is divided into a cover and a cavity, the cover and the cavity are tightly connected by threads, the cover is provided with a through hole, and the through hole is facing the upper substrate of the vacuum chamber; the cover and the cavity There is a thin metal sheet between the bodies, and the position corresponding to the through hole on the thin metal sheet is also a through hole. The addition of the thin metal sheet enhances the airtightness of the boron nitride crucible; the boron nitride crucible is cylindrical, The outer diameter is 3cm, the inner diameter is 1.5cm, and the height is 5cm.

[0028] Step 2, evacuate the vacuum chamber until the air pressure is 5×10 -5 The ultra-high vac...

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Abstract

The invention discloses a method for preparing a compact AlQ3 film. A vacuum chamber is opened; a boron nitride crucible is arranged in the vacuum chamber; and a powder evaporation material AlQ3 is put in the crucible. The boron nitride crucible consists of a cover and a cavity; the cover and the cavity are tightly connected through a thread; a through hole is formed in the cover, and is aligned to an upper substrate of the vacuum chamber; the vacuum chamber is vacuumized to an ultrahigh-vacuum state; the ultrahigh-vacuum state is maintained by 20 minutes; and the vacuum chamber is degassed. The boron nitride crucible is heated to reach the current of 22-25 A; at this time, the high-temperature gas-state AlQ3 material is absorbed on the upper substrate of the vacuum chamber through the through hole; the current of a current source in the evaporation process is stable; and the temperature of the substrate in the whole process is room temperature. An organic film prepared by the method is high in gathering density; a device prepared by the film emits light to generate heat; and in the process of continuously increasing the temperature, the crystal cannot be changed, so that maintenance of the light emitting property of the device is facilitated.

Description

technical field [0001] The invention belongs to the field of preparing semiconductor and organic optical thin films and OLED display devices, in particular to a method for preparing dense AlQ 3 thin film method. Background technique [0002] Organic electroluminescent materials have achieved rapid development, and the three primary colors for OLED displays have been released, and their luminescent materials can meet the requirements in terms of brightness and efficiency. However, organic light-emitting materials for OLED displays still have many problems, such as high cost and poor voltage stability. [0003] Compared with organic small molecules, polymers have good electrothermal stability and machinability, and are convenient to form, simple in process, and the resulting finished product has many functions and large area. However, the disadvantages of polymers are poor carrier transport ability and low device efficiency. In order to balance the number of carriers and im...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/24
CPCC23C14/081C23C14/243
Inventor 王志兵
Owner HOHAI UNIV
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