Infrared Gas Imaging Focal Plane and Imaging Method Based on Dual Sensitive Element Differential Signal
A technology of gas imaging and sensitive elements, applied in the field of infrared focal plane, can solve the problems of small effective dynamic detection range, inability to completely eliminate background photocurrent, and low detection sensitivity, and achieve large dynamic detection range, high gas detection sensitivity, and large The effect of dynamic range
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[0019] According to the technical scheme of the present invention, the infrared gas imaging focal plane based on the differential signal of dual sensitive elements can realize gas detection imaging of near, middle and far infrared waves. The basic structure of the imaging focal plane of the present invention is as attached figure 1 And figure 2 Shown. The following is a specific example to illustrate the imaging principle and method of the present invention. This example is for the SF whose fingerprint wavelength is 10.6μm. 6 Gas design, SF 6 It strongly absorbs infrared radiation near 10.6μm, and its transmission spectrum is as attached image 3 Shown.
[0020] In this example, the sensitive element A and B are made of GaAs / AlGaAs quantum well materials, which are grown by molecular beam epitaxy. The intrinsic absorption peak of the quantum well material is designed to be around 10.6μm. Its spectral response curve is shown in the attached file. Figure 4 Shown. The grown quantu...
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