High-sensitivity terahertz micro-fluid sensor based on band gap plasma resonance

A plasma and high-sensitivity technology, applied in the field of terahertz sensors, can solve the problems of inapplicable terahertz biological microfluidics, and achieve the effects of improving energy utilization, improving responsivity, and increasing the number of resonant rings

Inactive Publication Date: 2018-09-07
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

However, most MPA-based sensing devices use the surface plasmon field of the wave absorber to interact with the analyte, and do not make full use of th

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  • High-sensitivity terahertz micro-fluid sensor based on band gap plasma resonance
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  • High-sensitivity terahertz micro-fluid sensor based on band gap plasma resonance

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with the accompanying drawings.

[0022] A high-sensitivity terahertz microfluidic sensor based on bandgap plasmon resonance. The present invention uses an ingenious and effective combination and utilization of the microfluidic channel with an In-middle structure and a double-ring dipole unit, and proposes a sensor based on an MPA cavity The bulk-microfluidic channel composite structure realizes the limited electromagnetic field and then strengthens the interaction between the analyte and the terahertz, and obtains a high-sensitivity dual-band dipole mode resonance.

[0023] Such as figure 1 , 2 As shown, the structure of the present invention includes a cover plate, a dielectric ring, an upper metal array periodic structure layer, a microfluidic channel, a metal reflector, a substrate dielectric substrate and a liquid input and output channel. A dielectric ring is etched on the cover plate and a met...

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Abstract

The invention provides a high-sensitivity terahertz micro-fluid sensor based on band gap plasma resonance, and relates to the field of design of sensors. The high-sensitivity terahertz micro-fluid sensor comprises a cap, an etching groove, a metal array periodic structure layer, a micro-fluid channel, a metal reflective mirror, a substrate medium chip and a liquid inlet/output channel from top tobottom, wherein the cap is etched with the etching groove, and a metal micro-structure layer is attached to the etching groove; the metal plane reflective mirror is arranged on a substrate. The high-sensitivity terahertz micro-fluid sensor has the advantages that the metal array micro-structure uses the center-symmetric double-circular ring structure as a metal micro-structure array, so that the characteristics of no sensitivity to polarization and double resonance are realized; on the basis of double rings, the number of resonance rings can be increased, so as to realize the higher-order resonance response and multi-resonance detection; compared with the sensor without the etching groove, the sensitivity of the sensor provided by the invention is increased by 25% or above; compared with the existing sensor, the sensitivity is greatly increased; the structure is simple, and the processing and use are easy.

Description

technical field [0001] The invention relates to a high-sensitivity terahertz microfluidic sensor based on bandgap plasmon resonance, in particular to a terahertz sensor based on the combination of bandgap plasmon and microfluidic channels. Background technique [0002] In recent years, as a new type of detection method, metamaterial biosensors can break through the resolution limitation of traditional sensors, and have the characteristics of no label, fast response, timeliness and no loss. The research of this type of sensor mainly focuses on the microwave, terahertz and optical bands, etc., especially the research on biosensors in the terahertz band has attracted more attention. Through the study of terahertz waves, it is found that many biological macromolecules have characteristic peaks at the terahertz wave end, making terahertz sensing technology an important detection method for biomolecules and chemical substances. Utilizing the affinity combination of metamaterials ...

Claims

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Application Information

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IPC IPC(8): G01N21/3581B81B1/00
CPCB81B1/00B81B2201/0214G01N21/3581
Inventor 兰峰罗峰杨梓强张雅鑫史宗君张伟豪安思哲
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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