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A kind of micro-equipment and method for grinding single-crystal diamond micro-blade

A single crystal diamond, micro technology, applied in the direction of grinding/polishing equipment, metal processing equipment, grinding machine tool parts, etc., can solve the problem that the order of magnitude of micro-nano parts is not reached, and the micro-edge height of single crystal diamond tools is difficult Processing and other issues, to achieve the effect of compact structure, reduce cumulative error, and reduce vibration

Active Publication Date: 2019-06-28
SHANDONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Diamond grinding technology plays a very important role in the convenience of ultra-precision machining, and the quality of diamond tool grinding will be a key factor in the realization of nanoscale machining. As far as the existing technology is concerned, it is difficult to fine-tune the micro-edge of single crystal diamond tools. High-precision processing, because the large fixtures and machine tools used in the traditional processing industry cannot reach the order of magnitude required for micro-nano parts

Method used

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  • A kind of micro-equipment and method for grinding single-crystal diamond micro-blade
  • A kind of micro-equipment and method for grinding single-crystal diamond micro-blade
  • A kind of micro-equipment and method for grinding single-crystal diamond micro-blade

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Embodiment Construction

[0063] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, but the present invention is not limited to these embodiments.

[0064] like Figure 1 to Figure 36 Shown, a kind of micro-equipment for grinding single-crystal diamond micro-blade includes workpiece feeding device 3 and bush shaft drive feeding device 1.

[0065] The workpiece feeding device 3 includes a clamp 302 and a driving device that drives the clamp 302 to move horizontally and vertically. The single crystal diamond to be processed is clamped on the clamp 302 .

[0066] The clamp 302 includes a clamp support platform 3021 and a clamp body 3022 arranged above the clamp support platform 3021. The clamp body 3022 is in the shape of a few characters. The inside of the clamp body 3022 is provided with two oppositely arranged spring plates 3023. The two spring plates 3023 Cooperate between them to form a clamping gap for the single c...

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Abstract

The invention discloses miniature equipment for grinding monocrystal diamond micro blades. The equipment comprises a workpiece feeding device and a shaft sleeve and shaft transmission feeding device.The workpiece feeding device comprises a clamp and a driving device for driving the clamp to move transversely and longitudinally, and a to-be-machined monocrystal diamond is clamped on the clamp. Theshaft sleeve and shaft transmission feeding device comprises a case, a miniature grinding wheel and a planetary gear transmission system in the case. The invention further discloses a method for grinding the monocrystal diamond micro blades by the miniature equipment for grinding the monocrystal diamond micro blades. According to the method, an easy-to-grind direction of a crystal surface is determined by a laser positioning device, detected information is transmitted to a control system in real time, and the control system controls actions of the workpiece feeding device and the shaft sleeveand shaft transmission feeding device to realize grinding of the micro blades. By the equipment and the method, micro-nano ultra-precision grinding of the micro blades of monocrystal diamond tools can be realized.

Description

technical field [0001] The invention belongs to the field of ultra-precision grinding, in particular to a micro-equipment and method for grinding single-crystal diamond micro blades. Background technique [0002] In ultra-precision machining, in addition to high-precision machine tools and ultra-stable working environments, high-quality cutting tools are also an important aspect to ensure the quality of the machined surface. Single crystal diamond is considered to be the most ideal ultra-precision grinding tool because of its high hardness, good wear resistance, high strength, low friction coefficient with non-ferrous metals, excellent corrosion resistance and stable chemical properties. [0003] Diamond grinding technology plays a very important role in the convenience of ultra-precision machining, and the quality of diamond tool grinding will be a key factor in the realization of nanoscale machining. As far as the existing technology is concerned, it is difficult to fine-t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B3/00B24B41/06B24B47/20B24B41/00B24B47/04B24B41/02B24B49/12B24B55/00
CPCB24B3/00B24B41/005B24B41/007B24B41/02B24B41/06B24B47/04B24B47/20B24B49/12B24B55/00
Inventor 张金峰钟鑫封超许芝令张士鹤王保义王帅钟佩斯田和强
Owner SHANDONG UNIV OF SCI & TECH
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