Method for carrying out surface treatment on OLED manufacturing equipment

A technology for manufacturing equipment and surface treatment, which is applied in the field of OLED manufacturing equipment, can solve problems such as the inability to change the adsorption performance of metal surfaces, achieve the effects of improving adsorption or anti-adsorption performance, increasing the duration of the process, and avoiding serious consequences.

Inactive Publication Date: 2018-09-18
北京蜃景光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This invention cannot realize the change of the adsorption performance of the metal surface

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] This embodiment is an OLED evaporation equipment, the inner surface of the vacuum chamber of the OLED evaporation equipment has a first coating;

[0054] The outer surface of the stainless steel device (that is, the parts closer to the substrate and the source) of the OLED evaporation equipment has a second coating;

[0055] The contact angle of the first coating is 102°, and the surface free energy is 13mJ / m 2 ;

[0056] The contact angle of the second coating is 65°, and the surface free energy is 40mJ / m 2 .

[0057] The processing method of above-mentioned OLED evaporation equipment, comprises the following steps:

[0058] Step 1, use trichlorethylene to wipe the inner surface of the vacuum chamber and the outer surface of the stainless steel device, and then ultrasonically clean them in isopropanol and deionized aqueous solution for 10 minutes, wherein the volume ratio of the isopropanol to deionized water is 1:19;

[0059] Step 2. Soak the pretreated inner sur...

Embodiment 2

[0065] This embodiment is an OLED evaporation equipment, the inner surface of the vacuum chamber of the OLED evaporation equipment has a first coating;

[0066] The surface of the stainless steel device of the OLED evaporation equipment has a second coating;

[0067] The contact angle of the first coating is 105°, and the surface free energy is 17mJ / m 2 ;

[0068] The contact angle of the second coating is 70°, and the surface free energy is 35mJ / m 2 .

[0069] The treatment method of the above-mentioned OLED evaporation equipment is basically the same as that of Example 1, the only difference being that C 3 N 3 S 2 HK—N(C 6 h 13 ) 2 The volume ratio with sodium hydroxide solution is 3.2:1; C 3 N 3 S 2 The volume ratio of HK-SH to sodium hydroxide solution is 2.8:1.

Embodiment 3

[0071] This embodiment is an OLED evaporation fixture; the surface of the OLED evaporation fixture has a coating;

[0072] Coating contact angle is 110°, surface free energy is 20mJ / m 2 .

[0073] The processing method of the above-mentioned OLED evaporation fixture comprises the following steps:

[0074] Step 1. Wipe the outer surface of the OLED evaporation fixture with trichlorethylene, and then ultrasonically clean it in isopropanol and deionized aqueous solution for 10 minutes, wherein the volume ratio of isopropanol to deionized water is 1:19;

[0075] Step 2. Soak the outer surface of the pretreated OLED evaporation fixture in HCl and HNO 3 etched in the mixed solution for 25s, wherein the mass concentration of HCl in the mixed solution is 4g / L, and the HNO 3 The mass concentration is 3g / L;

[0076] Rinse the surface of the etched OLED evaporation fixture with deionized water, and then ultrasonically clean it in deionized water for 1 min;

[0077] Step 3, using tri...

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Abstract

The invention relates to a method for carrying out surface treatment on OLED manufacturing equipment. The method includes the steps of pre-treating a metal surface; etching the pre-treated metal surface through etching liquid; and electroplating the etched metal surface by taking a triazine compound as electroplate liquid, wherein the triazine compound is C3N3S2HK-SH or C3N3S2HK-N(C6H13)2. By treating the OLED manufacturing equipment with the method, the service cycle of the OLED manufacturing equipment can be prolonged, the possibility of falling-off and cracking after the manufacturing equipment is wrapped with evaporation materials is lowered, and particle inference and pollution are reduced.

Description

technical field [0001] The invention relates to the technical field of OLED manufacturing equipment, in particular to a method for surface treatment of OLED manufacturing equipment. Background technique [0002] Surface treatment is a method of artificially forming a surface layer on the surface of a base material with mechanical, physical and chemical properties different from that of the base. The purpose of surface treatment is to meet the corrosion resistance, wear resistance, decoration or other special functional requirements of the product. [0003] At present, organic evaporation technology is the core technology for manufacturing OLED devices, whether it is lighting devices or display devices, organic evaporation technology is currently the most feasible film-forming technology. [0004] However, organic evaporation needs to be carried out in a vacuum chamber environment. There are many components made of stainless steel in the vacuum chamber itself and inside the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D9/02C25D5/34C23C14/24
CPCC25D9/02C23C14/24C25D5/34
Inventor 郭建利
Owner 北京蜃景光电科技有限公司
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