Efficient ultra-precise shear thickening and chemical synergy polishing method

Abstract

The invention discloses an efficient ultra-precise shear thickening and chemical synergy polishing method. The polishing method comprises the following steps that 1, workpieces are fixed on a polishing and fixing disc of implementation equipment; 2, an efficient ultra-precise shear thickening and chemical synergy polishing solution is prepared, specifically, the polishing solution comprises polishing abrasive particles or micro-powder, a shear thickening enhanced phase, water and green chemistry environment-friendly substances; 3, the prepared polishing solution is added into a dust cover, anda polishing solution circulating device is started, so that the polishing solution is supplied to the surfaces of the workpieces through polishing tools; and 4, driving devices and driving mechanismsare started, so that the polishing tools move relative to the workpieces, and the machining surfaces of the workpieces are polished. According to the polishing method, active constraint of the solution flow boundary and active control of the flow of the polishing solution and the synergy between shear thickening and the green chemistry are utilized, so that the machining efficiency and the machining precision are improved, and the types of machinable materials and the surface shape are increased.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision machining, and in particular relates to a shear thickening-chemical synergistic polishing method. Background technique [0002] Polishing has always been the most important method of ultra-precision machining. Its main function is to reduce the surface roughness of the workpiece, remove the damaged layer, correct the surface shape error, and obtain the final processing means of high precision and high surface quality. Research and development of high-efficiency, high-quality, high-precision, and low-cost ultra-precision machining methods has always been one of the main directions of polishing technology development. In many application fields of science and technology, various hard and brittle or soft and brittle difficult-to-machine materials such as special optical glass, sapphire, silicon nitride, single crystal silicon, and lithium tantalate have appeared; in addition, the surface shap...

AI Technical Summary

Problems solved by technology

However, electrolytic polishing has the following disadvantages: it is more sensitive to surface order structure; it is difficult to maintain the accuracy of part size and geometry; there are spots on the workpiece surface after polishing

However, this kind of polishing liquid is only used to polish low-dielectric materials. The polishing quality of non-low-dielectric material workpieces is not good, and the range of processed materials is small; there is no control over the surface shape and precision of the workpiece, and the processing of surface shapes such as curved surface workpieces cannot be guaranteed. ; This invention has non-environmentally friendly substances such as chelating agents, azole film-forming agents and oxidants, and increases the processing links and costs of polishing waste liquid

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