A double-layer composite sio 2 Preparation method of anti-reflection film
An anti-reflection film, double-layer composite technology, applied in the field of preparation of double-layer composite SiO2 anti-reflection film, can solve the problems of poor anti-reflection effect, poor mechanical properties, unsatisfactory and other problems, achieve good weather resistance, low refractive index, The effect of high transmittance
Active Publication Date: 2021-11-23
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
SiO prepared by basic catalyst 2 Anti-reflection coating has the advantages of low refractive index and high transmittance, but its mechanical properties are poor and cannot meet the requirements of practical application; SiO prepared by acid catalyst 2 Anti-reflection coating, which has excellent mechanical properties and wear resistance, but the anti-reflection effect is poor
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[0034] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0035] Double-layer composite SiO of the present invention 2 The preparation method of anti-reflection film specifically comprises the following steps:
[0036] Step 1, mix ethyl orthosilicate, absolute ethanol, hydrochloric acid and water in a molar ratio of 1:40:0.04:4, stir at room temperature for 10 hours and let stand for 7 days to obtain acid-catalyzed SiO 2 Sol A; Among them, SiO 2 The mass percent concentration of sol A is 3%; in the above reaction system, hydrochloric acid is the acid catalyst, tetraethyl orthosilicate is the silicon source, and absolute ethanol is the solvent;
[0037] Step 2, mix ethyl orthosilicate, absolute ethanol, ammonia water and water in a molar ratio of 1:37.6:0.17:3.25, stir at room temperature for 10 hours and then stand for 7 days to obtain alkali-catalyzed SiO 2 Sol B; among ...
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Abstract
The invention discloses a double-layer composite SiO 2 The preparation method of the anti-reflection film is to add the silicon source to the mixture of absolute ethanol, hydrochloric acid and water, stir evenly at room temperature and then let it stand for several days to obtain the acid-catalyzed SiO 2 Sol A: Add the silicon source to the mixture of absolute ethanol, ammonia and water, stir evenly at room temperature and let it stand for several days to obtain alkali-catalyzed SiO 2 Sol B; the SiO 2 Sol A and the SiO prepared in step 2 2 Sol B removes acid and ammonia respectively to obtain SiO 2 Sol A1 and SiO 2 Sol B1; the SiO 2 Sol A1 and SiO 2 Sol B was mixed according to the mass ratio of 1:4, SiO 2 Sol A and SiO 2 Sol B1 was mixed according to the mass ratio of 2:3, stirred evenly and then left to stand for several days to obtain composite sols S-20% and S-40% respectively; in an environment with a relative humidity <50%, the pretreated substrate Immerse in the composite sol S-40% for coating, let the coated substrate stand for a few minutes, then immerse the substrate in the composite sol S-20% for coating; finally place the substrate coated with double-layer film in the HMDS atmosphere for processing. Can.
Description
technical field [0001] The invention relates to a double-layer composite SiO 2 The invention discloses a method for preparing an anti-reflection film, belonging to the technical field of optical thin films. Background technique [0002] Anti-reflection coating is the most widely used film in modern optics. It uses the interference of the film to weaken or eliminate the reflected light and stray light on the optical surface to increase the transmittance of the film. The antireflection coating prepared by the sol-gel method has the advantages of simple operation, low cost, suitable for irregular surfaces and large-scale industrial production. SiO prepared by basic catalyst 2 Anti-reflection coating has the advantages of low refractive index and high transmittance, but its mechanical properties are poor and cannot meet the requirements of practical application; SiO prepared by acid catalyst 2 Anti-reflection coating has excellent mechanical properties and wear resistance, bu...
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IPC IPC(8): C03C17/23
CPCC03C17/23
Inventor 陶朝友邹鑫书
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS