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Preparation method of intelligent glass cathode electrochromic layer coating material

An electrochromic layer, smart glass technology, applied in metal material coating process, coating, sputtering and other directions, can solve the problems of abnormal arc and dust, affecting equipment utilization rate, slow coating rate, etc. Density and uniformity prolongation, chemical stability improvement, film roughness reduction effect

Inactive Publication Date: 2018-10-16
SHENZHEN KING CHUANG TECH & ELECTRONICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The coating rate of reactive sputtering is very slow (10nm / min), and the surface of the target is often poisoned by reactive sputtering due to a large amount of oxygen flow, resulting in abnormal arc and dust falling, which affects the quality and yield of the film
Reactive sputtering also causes poor uniformity of large-area films. In order to maintain the quality of the film, it is necessary to regularly arrange openings to clean the target surface and cavity during the sputtering process, which seriously affects the utilization rate of the equipment.
Due to the above reasons, the cost of smart glass is currently high and the progress of industrialization is slow.

Method used

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Embodiment 1

[0015] A preparation method of smart glass cathodic electrochromic layer coating material, using pure tungsten oxide powder, then adding 68wt% zirconia balls, 30wt% pure water and 2wt% dispersant, grinding and mixing sufficiently, the time is 24 hours, Then pour the slurry into a three-inch porous mold, and after 24 hours of drying, the low-density green body of the oxide is formed by demolding, and then sintered in a vacuum sintering furnace at a high temperature of 1100 ° C for 3 hours, and the vacuum degree is 200mmHg , to form a high-density target body for sputtering, which is cut and ground into a three-inch target; then the required coated glass substrate is placed in the sputtering chamber, and the sputtering chamber is vacuumed by a vacuum pumping system. The background pressure was pumped to 0.7×10 -5 After torr, the mixed gas of argon and oxygen is introduced, the volume ratio of oxygen in the mixed gas is 2%, and the working pressure of the sputtering chamber is co...

Embodiment 2

[0017]A preparation method of smart glass cathodic electrochromic layer coating material, using pure tungsten oxide powder, then adding 68wt% zirconia balls, 30wt% pure water and 2wt% dispersant, grinding and mixing fully, the time is 36 hours, Then pour the slurry into a three-inch porous mold, and after 24 hours of drying, the low-density green body of the oxide is formed by demolding, and then sintered in a vacuum sintering furnace at a high temperature of 1200°C for 5 hours, with a vacuum degree of 400mmHg , to form a high-density target body for sputtering, which is cut and ground into a three-inch target; then the required coated glass substrate is placed in the sputtering chamber, and the sputtering chamber is vacuumed by a vacuum pumping system. The background pressure was pumped to 0.8×10 -5 After torr, a mixed gas of argon and oxygen is introduced, the volume ratio of oxygen in the mixed gas is 3%, and the mixed gas is passed through the throttle valve to control the...

Embodiment 3

[0019] A preparation method of smart glass cathodic electrochromic layer coating material, using pure tungsten oxide powder, then adding 68wt% zirconia balls, 30wt% pure water and 2wt% dispersant, grinding and mixing fully, the time is 48 hours, Then pour the slurry into a three-inch porous mold. After 24 hours of drying, the low-density green body of the oxide is formed by demolding, and then sintered in a vacuum sintering furnace at a high temperature of 1400 ° C for 6 hours, and the vacuum degree is 600mmHg. , to form a high-density target body for sputtering, which is cut and ground into a three-inch target; then the required coated glass substrate is placed in the sputtering chamber, and the sputtering chamber is vacuumed by a vacuum pumping system. The background pressure was pumped to 0.9×10 -5 After torr, a mixed gas of argon and oxygen is introduced, the volume ratio of oxygen in the mixed gas is 5%, and the mixed gas is passed through the throttle valve to control th...

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Abstract

The invention discloses a preparation method of an intelligent glass cathode electrochromic layer coating material. In a process of preparing the intelligent glass cathode electrochromic layer tungsten oxide coating material, various oxides are fully and uniformly mixed by using slip casting, so that the density and uniformity of a target material are improved, and then the service life of the target material is prolonged. The chemical stability of the tungsten oxide material is improved by adding a second oxide into the tungsten oxide. Oxygen vacancies are formed by the vacuum treatment in asintering process, so that the material has conductivity, and stable sputtering is facilitated. In addition, a process of staged heating sintering is adopted, and other gases are added in argon gas, so that the film-forming rate can be improved, the surface roughness can be reduced, the sputtering rate can be improved, the film roughness can be reduced, the activation of equipment can be improved,the production cost can be reduced, the application of the tungsten oxide film in electrochromic devices is greatly improved, the production requirements are met, and the market promotion and productpopularization are facilitated.

Description

technical field [0001] The invention relates to a preparation method of a coating material, in particular to a preparation method of a coating material for an intelligent glass cathode electrochromic film. Background technique [0002] Electrochromism refers to the phenomenon that the optical properties of materials (transmission, reflection and absorption of light) undergo stable and reversible changes in a certain wavelength range including visible light wavelengths through the action of an external electric field or current. A reversible change in transparency. After decades of development, electrochromic materials have entered the stage of applying electrochromic devices from the experimental stage. According to the adjustable transmission, adjustable reflection, information display and radiation adjustable properties of electrochromic materials, the corresponding electrochromic devices include smart windows, mirrors, displays, etc. [0003] Electrochromic materials re...

Claims

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Application Information

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IPC IPC(8): C03C17/23C23C14/34C23C14/08
CPCC03C17/006C03C17/23C03C2217/23C03C2217/90C03C2218/17C23C14/08C23C14/083C23C14/3414
Inventor 黄信二
Owner SHENZHEN KING CHUANG TECH & ELECTRONICS
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