Tubular PECVD storage boat preheating device for crystalline silicon solar cell and coating method

Abstract

The invention relates to a tubular PECVD storage boat preheating device for a crystalline silicon solar cell and a coating method. According to the storage boat preheating device, an original storageboat frame is omitted, a transmission rail A and a transmission rail B are additionally arranged on a position of the original storage boat frame and are on the same straight line of the original storage boat frame, a storage boat preheating box is arranged right above the transmission rail B, and a transmission tray slides between the two rails. During operation, the transmission tray is firstlypositioned on the rail A, a mechanical arm loads a graphite boat to the transmission tray, the transmission tray carries the graphite boat to be conveyed to the rail B and loaded into the storage boatpreheating box; the graphite boat is preheated in the box during the time period of waiting for an empty tube, and meanwhile, oxygen in the air is used for oxidizing a silicon wafer, so that the ozone oxidation process at an etching blanking position can be omitted; and when the empty tube is available, the transmission tray and the graphite boat are conveyed to the rail A and then enter the empty tube for coating. Due to the fact that the graphite boat is preheated and oxidized in advance, an original heating step is omitted in coating process, the whole process period in the tube is shortened by about 13.7 minutes, and yield is increased by 50%.

Description

technical field [0001] The invention relates to a tubular PECVD production process in a crystalline silicon solar cell, in particular to a tubular PECVD preheating storage boat device and a coating method for a crystalline silicon solar cell. Background technique [0002] In the PECVD process of solar cell production, after the silicon wafer flows out of the etching machine, it first passes through the ozone station to form a 3nm silicon oxide layer on the coating surface, and then the silicon wafer is inserted into the graphite boat. After the insertion is completed, the graphite boat is The mechanical arm is installed on the boat storage rack, and when there is an empty tube, the boat will enter the empty tube for coating, and the coating time for the whole tube is about 38 minutes. Adding the loading and unloading of the boat by the mechanical arm, the entire process cycle is 41 minutes. After entering the tube, the main process steps are: entering the boat—heating—const...

AI Technical Summary

Problems solved by technology

After entering the tube, the main process steps are: entering the boat—heating—constant temperature—evacuation—deposition—exiting the boat. The deposition step only accounts for 27.3% of the entire process time, while the temperature rise and constant temperature time account for 34% of the entire process time, which is longer. The heating step of time greatly affects the yield of tubular PECVD

And the ozone station needs to add additional equipment during the formation of ozone, and at the same time needs to consume oxygen, air pressure, etc.

If the ozone production process is not properly controlled, ozone will leak into the air and cause pollution

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