High-distribution density nanometer-spaced ordered array as well as preparation method and application thereof
A technology of distribution density and nano-gap, which is applied in the field of high-density distribution nano-gap ordered array and its preparation, can solve the problems of nanostructure unit gap control, uneven distribution of active sites, poor signal stability and reproducibility, etc. Achieve the effects of increased local electromagnetic field strength, improved sensitivity, and low cost
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[0034] Specifically, the method for preparing an ordered array of nano-gap with high distribution density in the present invention includes the following steps:
[0035] (1) Step A. Place the precious metal nanoparticle array together with the substrate in a reactive ion etching machine for etching. The vacuum degree of the reactive ion etching machine is 150mT, the power is 50~200w, and the etching time is 2~ 30min, gas flow is CF 4 / O 2 =45 / 5Sccm (that is, the gas uses FC 4 With O 2 Mixed gas, and FC 4 The flow rate is 45Sccm, O 2 The gas flow rate is 5 Sccm), so as to prepare a high-distribution density nano-gap ordered columnar array template.
[0036] Among them, the substrate is preferably silicon wafer, quartz wafer or silicon dioxide wafer. The noble metal nano-particle array is an ordered single-layer noble metal nano-particle array that is uniformly grown on a substrate and arranged in a hexagonal tight arrangement, and the particle size of the noble metal nano-particles ...
Embodiment 1
[0049] A high-distribution density nano-gap ordered array, and its preparation method includes the following steps:
[0050] Step a1. Add chloroauric acid, diethylene glycol phthalate diacrylate (PDDA) and hydrochloric acid to the ethylene glycol solution, then heat to 195°C in an oil bath, keep it for 30 minutes, and then use a small amount of hydrochloric acid to wet By chemical etching, a monodisperse colloidal solution of gold ball nanoparticles is prepared.
[0051] Step b1. Centrifugal separation of the gold ball nanoparticle colloidal solution, the centrifugal separation speed is 10000-12000 rpm, the centrifugal separation treatment time is 10-30 minutes, remove the upper layer of the centrifuge tube, and repeat the centrifugation three times Separate, and then disperse the precipitate after centrifugation into the n-butanol solution, thereby preparing the n-butanol dispersion of gold ball nanoparticles.
[0052] Step c1: Use a gas-liquid interface self-assembly method to sel...
Embodiment 2
[0056] A high-distribution density nano-gap ordered array, and its preparation method includes the following steps:
[0057] Step a2. Add chloroauric acid, diethylene glycol diacrylate (PDDA) and hydrochloric acid to the ethylene glycol solution, then heat to 195°C in an oil bath, keep it for 30 minutes, and then use a small amount of hydrochloric acid to wet By chemical etching, a monodisperse colloidal solution of gold ball nanoparticles is prepared.
[0058] Step b2. Centrifugal separation of the gold ball nanoparticle colloidal solution, the centrifugal separation speed is 10000-12000 rpm, the centrifugal separation processing time is 10-30 minutes, the upper liquid of the centrifuge tube is removed, and the centrifugation is repeated three times Separate, and then disperse the precipitate after centrifugation into the n-butanol solution, thereby preparing the n-butanol dispersion of gold ball nanoparticles.
[0059] Step c2: Use the gas-liquid interface self-assembly method to ...
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