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Quartz crucible and multiple coating process method thereof

A technology of quartz crucible and process method, which is applied in chemical instruments and methods, polycrystalline material growth, self-melting liquid pulling method, etc., and can solve problems such as poor quality of single crystal, generation of dislocations, and influence on single crystal crystallization

Inactive Publication Date: 2019-01-25
INNER MONGOLIA ZHONGHUAN SOLAR MATERIAL
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  • Abstract
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  • Application Information

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Problems solved by technology

However, due to the high chemical activity of silicon in the molten state, it will react with the quartz crucible, that is, SiO2+Si→2SiO. During this period, the silicon oxide produced enters the molten silicon, making the growing crystal structure occur Changes, resulting in dislocations, which affect the crystallization of the single crystal, making the quality of the single crystal poor

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  • Quartz crucible and multiple coating process method thereof
  • Quartz crucible and multiple coating process method thereof

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0024] figure 1 It shows a schematic structural diagram of an embodiment of the present invention, specifically showing the structure of this embodiment. This embodiment relates to a quartz crucible for increasing the feeding capacity of a single crystal furnace, which is used for Czochralski single crystal. The quartz crucible With a multi-layer structure, it can form a layer of dense and tiny cristobalite crystals on the wall of the quartz crucible during the Czochralski single crystal process, which can enhance the service life of the crucible, prevent the silicon solution from corroding the quartz crucible, and improve the quality of the Czochralski single crystal. The crystal formation rate is improved, and the strength of the quartz crucible is enhanced at the same time, and the production capacity of Czochralski single crystal production...

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Abstract

The invention provides a quartz crucible and a multiple coating process method thereof. The quartz crucible comprises a bubble composite layer, a translucent layer and a coating, the coating includesa first coating and a second coating, the bubble composite layer, the translucent layer, the first coating and the second coating are sequentially arranged from outside to inside, the surface of the translucent layer of the quartz crucible is coated with barium solution, and barium carbonate is added at taking and re-adding stage of a directly drawn single crystal, enters the quartz crucible and is positioned at a corner R of the quartz crucible. The quartz crucible has the advantages that the quartz crucible is simple in structure and convenient to use, the quartz crucible is conveniently used when a single crystal is directly drawn and has a barium carbonate coating, corrosion of silicon solution to the inner wall of the quartz crucible is reduced, and the service life of the quartz crucible is prolonged.

Description

technical field [0001] The invention belongs to the technical field of Czochralski single crystal, and in particular relates to a quartz crucible and a process method for multiple coatings of the quartz crucible. Background technique [0002] The existing quartz crucible for crystal pulling is composed of two parts, the outer layer is a bubble composite layer with a high bubble density area and the inner side is a 3-5mm transparent layer, thereby improving the crystallization rate and quality of single crystal. However, due to the high chemical activity of silicon in the molten state, it will react with the quartz crucible, that is, SiO2+Si→2SiO. During this period, the silicon oxide produced enters the molten silicon, making the growing crystal structure occur Changes, resulting in dislocations, which affect the crystallization of the single crystal, making the quality of the single crystal poor. Contents of the invention [0003] In view of the above problems, the probl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/10C30B15/02C30B29/06
CPCC30B15/02C30B15/10C30B29/06
Inventor 陈培杰马国瑞霍志强王凯许建郭谦刘有益高树良谷守伟高润飞
Owner INNER MONGOLIA ZHONGHUAN SOLAR MATERIAL