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Design and processing method of special-shaped cantilever beam probe for ultra-low friction coefficient measurement

An ultra-low friction and friction coefficient technology, which is used in the design and processing of micro-cantilever beam probes with special-shaped cross-sections, which can solve the problems of inability to measure, not paying attention to ultra-low friction coefficient measurement, and far from realizing friction coefficient measurement.

Active Publication Date: 2020-10-23
SOUTHWEST JIAOTONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, at present, the measurement of ultra-low friction coefficient under the state of nanoscale single-point contact is a recognized technical problem, which is mainly reflected in the following two aspects: first, nanoscale single-point contact is usually realized by atomic force microscope, and atomic force microscope is mainly used in Surface topography scanning, mechanical performance testing, etc., have basically not paid attention to the measurement of ultra-low friction coefficient; secondly, the resolution of friction coefficient reported in the literature is usually on the order of 0.01, which is far from being realized by 10 -6 and above magnitude (-6 higher accuracy) resolution of the coefficient of friction measurement
When the coefficient of friction is further reduced to 10 -6 And above the magnitude, the friction signal will be completely covered by the system noise and cannot be measured

Method used

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  • Design and processing method of special-shaped cantilever beam probe for ultra-low friction coefficient measurement
  • Design and processing method of special-shaped cantilever beam probe for ultra-low friction coefficient measurement
  • Design and processing method of special-shaped cantilever beam probe for ultra-low friction coefficient measurement

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Embodiment 1

[0063] The special-shaped cross-section micro-cantilever probe designed in this embodiment is mainly composed of the following two parts: the first beam for reflecting laser light and the first beam fixedly connected with the first beam for supporting and fixing. Two beams; the axis is a straight line, and the cross-section along the axis is equal. In order to facilitate the reflection of laser light and improve the workability of the probe, the cross-section is a special-shaped cross-section composed of several narrow and long rectangles with equal wall thickness. In this embodiment, the cross-sections of five shapes are selected as the design basis, including mouth-shaped, I-shaped, H-shaped, inverted T-shaped and U-shaped, and the design method of the micro-cantilever beam probe with special-shaped cross-section is described in detail, but this The five shapes do not constitute any limitation to the special-shaped cross-section micro-cantilever beam probe of the present inve...

Embodiment 2

[0137] This embodiment designs the special-shaped cross-section micro-cantilever probe according to the following ultra-low friction coefficient measurement requirements: 1) Realize 10 -6 2) The maximum positive pressure that can be loaded is equal to or close to 25μN; 3) The material of the micro-cantilever is silicon nitride; 4) The tip height is 23μm, and the tip material is graphene-coated Covered with silica microspheres; 5) The experimental platform is MFP-3D atomic force microscope.

[0138] The design steps of the special-shaped cross-section micro-cantilever probe in this embodiment are consistent with the steps in embodiment 1, and the results of theoretical calculation and finite element simulation are shown in Table 1 and Figure 6 shown. It can be seen that except for the mouth-shaped cross-section, the I-shaped, H-shaped, inverted T-shaped, and U-shaped cross-sections fully meet the set requirements. For the mouth-shaped cross-section, the method of replacing t...

Embodiment 3

[0141] This embodiment provides a method for processing a micro-cantilever beam probe with a special-shaped cross-section that meets the measurement requirements of nanoscale single-point contact and ultra-low friction coefficient. Considering the convenience of probe processing, the U-shaped cross-section micro-cantilever probe is taken as an example. Two commercial probes HYDRA2R-50NG-TL (manufactured by Applied NanoStructures, USA) close to the design size of the U-shaped cross-section were selected as the processing objects. Such as Figure 5 As shown, first use focused ion beam to cut and process two pieces of the second beam for supporting and fixing from one of the HYDRA2R-50NG-TL commercial probes, and then use focused ion beam welding to cut the two pieces for supporting and fixing The second beam is welded to another uncut HYDRA2R-50NG-TL commercial probe (that is, the first beam used to reflect the laser); finally use AB glue (or UV curing glue, etc.) on the MFP-3D...

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Abstract

The invention provides a design and processing method of a special-shaped cross-section micro-cantilever beam probe applied to the measurement of ultra-low friction coefficient of nano-scale single-point contact. The design method is to first establish a universal friction coefficient measurement theoretical model; and then Combining with the structural characteristics of micro-cantilever probes with special-shaped cross-sections, a theoretical model of friction coefficient measurement suitable for micro-cantilever probes with special-shaped cross-sections is established; According to constraints such as the minimum friction force measured and the characteristics of the atomic force microscope, a micro-cantilever probe with a special-shaped cross-section that meets the measurement requirements is designed. The probe designed and processed by the method proposed by the present invention can significantly improve the measurement resolution of the friction coefficient and realize 10 ‑6 The measurement of the ultra-low friction coefficient with a resolution of the order of magnitude and above ensures the authenticity and reliability of the quantitative analysis of the super-slip process, and provides an important measurement method for in-depth and systematic research on the theory and technology of super-slip.

Description

technical field [0001] The invention belongs to the technical field of analysis and measurement control in instrumentation technology, and specifically relates to a design and processing method of a micro-cantilever beam probe with a special-shaped cross-section applied to the measurement of ultra-low friction coefficient at the nanometer level. Background technique [0002] With the rapid growth of the world economy, the losses caused by friction and wear in various industries have also increased accordingly, and the energy crisis has become increasingly severe. According to foreign statistics, friction consumes 30% of the world's primary energy, and about 80% of machine parts fail due to wear and tear. According to incomplete statistics, the economic loss caused by friction and wear in my country reaches trillions of yuan every year. Discovering new anti-friction and lubrication technologies has become an important research field for saving energy and resources. In recen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N19/02
CPCG01N19/02G01Q60/26G01Q70/10G01Q70/16
Inventor 钱林茂江亮林斌雒建斌
Owner SOUTHWEST JIAOTONG UNIV