Design and processing method of special-shaped cantilever beam probe for ultra-low friction coefficient measurement
An ultra-low friction and friction coefficient technology, which is used in the design and processing of micro-cantilever beam probes with special-shaped cross-sections, which can solve the problems of inability to measure, not paying attention to ultra-low friction coefficient measurement, and far from realizing friction coefficient measurement.
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Embodiment 1
[0063] The special-shaped cross-section micro-cantilever probe designed in this embodiment is mainly composed of the following two parts: the first beam for reflecting laser light and the first beam fixedly connected with the first beam for supporting and fixing. Two beams; the axis is a straight line, and the cross-section along the axis is equal. In order to facilitate the reflection of laser light and improve the workability of the probe, the cross-section is a special-shaped cross-section composed of several narrow and long rectangles with equal wall thickness. In this embodiment, the cross-sections of five shapes are selected as the design basis, including mouth-shaped, I-shaped, H-shaped, inverted T-shaped and U-shaped, and the design method of the micro-cantilever beam probe with special-shaped cross-section is described in detail, but this The five shapes do not constitute any limitation to the special-shaped cross-section micro-cantilever beam probe of the present inve...
Embodiment 2
[0137] This embodiment designs the special-shaped cross-section micro-cantilever probe according to the following ultra-low friction coefficient measurement requirements: 1) Realize 10 -6 2) The maximum positive pressure that can be loaded is equal to or close to 25μN; 3) The material of the micro-cantilever is silicon nitride; 4) The tip height is 23μm, and the tip material is graphene-coated Covered with silica microspheres; 5) The experimental platform is MFP-3D atomic force microscope.
[0138] The design steps of the special-shaped cross-section micro-cantilever probe in this embodiment are consistent with the steps in embodiment 1, and the results of theoretical calculation and finite element simulation are shown in Table 1 and Figure 6 shown. It can be seen that except for the mouth-shaped cross-section, the I-shaped, H-shaped, inverted T-shaped, and U-shaped cross-sections fully meet the set requirements. For the mouth-shaped cross-section, the method of replacing t...
Embodiment 3
[0141] This embodiment provides a method for processing a micro-cantilever beam probe with a special-shaped cross-section that meets the measurement requirements of nanoscale single-point contact and ultra-low friction coefficient. Considering the convenience of probe processing, the U-shaped cross-section micro-cantilever probe is taken as an example. Two commercial probes HYDRA2R-50NG-TL (manufactured by Applied NanoStructures, USA) close to the design size of the U-shaped cross-section were selected as the processing objects. Such as Figure 5 As shown, first use focused ion beam to cut and process two pieces of the second beam for supporting and fixing from one of the HYDRA2R-50NG-TL commercial probes, and then use focused ion beam welding to cut the two pieces for supporting and fixing The second beam is welded to another uncut HYDRA2R-50NG-TL commercial probe (that is, the first beam used to reflect the laser); finally use AB glue (or UV curing glue, etc.) on the MFP-3D...
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Abstract
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