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Incident angle-insensitive color filter based on porous alumina and preparation method thereof

A technology of porous alumina and color filters, applied in the field of filters, can solve problems such as affecting the display performance of the spectral curve of the filters

Active Publication Date: 2020-01-31
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The patent application with the application publication number CN103592715A discloses a method for preparing a color filter based on porous alumina, specifically a color filter based on a metal-dielectric-metal structure. If the filter is exposed for a long time On the outside, the upper and lower metal layers will be oxidized to different degrees, which will greatly affect the spectral curve and display performance of the filter.

Method used

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  • Incident angle-insensitive color filter based on porous alumina and preparation method thereof
  • Incident angle-insensitive color filter based on porous alumina and preparation method thereof
  • Incident angle-insensitive color filter based on porous alumina and preparation method thereof

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Experimental program
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Effect test

preparation example Construction

[0054] The preparation process of angle-insensitive color filters is as follows: figure 2 shown, including:

[0055] 1) For the selected cyan-magenta yellow (CMY) spectrum, according to the color of the final filter, determine the parameters of porous alumina and design the thickness of the vacuum thermally deposited metal layer and the thickness of the atomic layer deposition high refractive index medium;

[0056] 2) placing the substrate with porous alumina in a vacuum coating device, controlling the deposition parameters, and depositing the metal film obtained in step 1) on the substrate;

[0057] 3) Take out the metal-coated substrate from the vacuum coating equipment, and calculate the number of coating cycles according to the thickness of the high-refractive-index dielectric layer designed in step 1); control the parameters using atomic layer deposition technology, and plate a thin film with a corresponding number of cycles.

Embodiment 1

[0059] Angle-insensitive cyan filter:

[0060] The structure of the filter is as figure 1 As shown, it includes the substrate and the porous alumina attached to the substrate, the metal layer and the high refractive index dielectric layer. The metal material is aluminum, the high refractive index material is titanium dioxide, and the base material is fused silica glass. The parameters used to prepare each part are as follows:

[0061]

[0062] When plating the metal aluminum layer, control the vacuum degree of the evaporation chamber to be lower than 3×10 -3 Pa, the substrate temperature is 27°C, during evaporation, the evaporation rate is controlled to be stable at 0.1nm / s; when titanium oxide is plated, the vacuum degree of the reaction chamber is controlled at 3mbar, the base temperature is 120°C, and the precursor passes through each cycle. The injection time is 300ms, and the nitrogen purge time is 4s.

[0063] The reflection spectra of the prepared cyan angle-inse...

Embodiment 2

[0065] Angle-insensitive magenta filters:

[0066] The structure of the filter is as figure 1 As shown, it includes the substrate and the porous alumina attached to the substrate, the metal layer and the high refractive index dielectric layer. The metal material is aluminum, the high refractive index material is titanium dioxide, and the base material is fused silica glass. The parameters used to prepare each part are as follows:

[0067]

[0068] When plating the metal aluminum layer, control the vacuum degree of the evaporation chamber to be lower than 3×10 -3 Pa, the substrate temperature is 27°C, during evaporation, the evaporation rate is controlled to be stable at 0.1nm / s; when titanium oxide is plated, the vacuum degree of the reaction chamber is controlled at 3mbar, the base temperature is 120°C, and the precursor passes through each cycle. The injection time is 300ms, and the nitrogen purge time is 4s.

[0069] The reflection spectrum of the prepared magenta an...

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Abstract

The invention discloses a color filter insensitive in incident angle based on porous aluminum oxide. The color filter comprises a substrate, the porous aluminum oxide fixed to the substrate and provided with pores regularly and evenly distributed, a metal layer depositing on the porous aluminum oxide, and a high-refraction-index medium layer depositing on the metal surface, wherein the thickness of metal depositing on the surface of the aluminum oxide is larger than the thickness of the metal in the pores, the thickness of the metal in the pores is smaller than the depth of the pores, and thepores are fully filled with a high-refraction-index medium material. The filter is simple in structure, convenient to prepare, low in cost and convenient to produce on a large scale in batches. The color filter further discloses a preparing method of the color filter insensitive in incident angle based on the porous aluminum oxide. The preparing method is simple and suitable for large-area batchedproduction, and the preparing cost of the color filter is greatly reduced.

Description

technical field [0001] The invention relates to the field of optical filters, in particular to a porous alumina-based color filter that is not sensitive to incident angles and a method for preparing the color filter that is not sensitive to incident angles. Background technique [0002] A filter that works in the visible spectrum is called a color filter, which can transmit or reflect colored light within a certain wavelength range, thus presenting a certain color. Color filters are mostly used in the same color light and color-related occasions, especially in the field of imaging and display, such as liquid crystal display, projection display, photography and video, color decoration, green printing, etc. Traditional chemical dye color filters use special functional groups in dye molecules to selectively absorb light in a specific wavelength range of incident light to achieve the filtering effect, but dyes will cause instability in material properties and significant environ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/20G02B1/00G02B1/10
CPCG02B1/00G02B1/10G02B5/20
Inventor 沈伟东王震杨陈楹沐雯章岳光郑晓雯袁华新袁文佳
Owner ZHEJIANG UNIV
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