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Method and device for online preparation of micron-scale tool electrodes with large aspect ratio by vertical liquid film

A tool electrode, large aspect ratio technology, applied in the direction of manufacturing tools, machining electrodes, electrode manufacturing, etc., can solve the problems of large electrode taper, electrode diffusion layer hindering processing, low length and diameter, etc., to achieve the effect of extending the processing area

Active Publication Date: 2020-04-24
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

[0005] Aiming at the problem that the traditional horizontal liquid film method prepares the tool electrode, the diffusion layer hinders the processing, and the processed electrode has a large taper and a low long-diameter ratio, so it cannot process workpieces with large thickness

Method used

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  • Method and device for online preparation of micron-scale tool electrodes with large aspect ratio by vertical liquid film
  • Method and device for online preparation of micron-scale tool electrodes with large aspect ratio by vertical liquid film
  • Method and device for online preparation of micron-scale tool electrodes with large aspect ratio by vertical liquid film

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Embodiment Construction

[0025] according to figure 1 The present invention proposes a method for online preparation of a large aspect ratio micron-scale tool electrode by a vertical liquid film. Its main features are: placing the metal ring 2 vertically, and forming The liquid film 4 is vertical, and the tool electrode 5 is placed horizontally in the liquid film and exerted a horizontal reciprocating motion, and the DC or pulse power supply 1 is connected for electrochemical etching. The initial diameter of the tool electrode 5 is 20um-300um, the diameter of the metal ring 2 is 3mm-6mm, the movement range of the anode metal wire 24 is 100um-500um, and the movement speed is 1-100um / s.

[0026] figure 2 Shown is the overall device diagram and enlarged view of the vertical liquid film on-line preparation of the micron-scale tool electrode with large aspect ratio. The overall structure of the device mainly includes an anode rotating mechanism 9, an anode fixing mechanism 10, and a liquid film generati...

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Abstract

The invention relates to a method and device for preparing a large aspect ratio micrometer tool electrode online by a vertical liquid film, and belongs to the field of electrochemical processing. Themethod and the device for preparing the large aspect ratio micrometer tool electrode online by the vertical liquid film are characterized in that the vertical liquid film is formed on a metal ring byusing of the surface tension of the liquid; an anode metal wire horizontally penetrates through the true central of the vertical liquid film; the vertical liquid film is perpendicular to the anode metal wire by adjusting the metal ring through a clamp; the anode metal wire is driven by a machine tool to perform horizontally reciprocating motion in the vertical liquid film; the positive pole and negative pole of the direct current or pulse power supply are correspondingly connected to the anode metal wire and the metal ring, and when power-on, the left and right symmetrical, large aspect ratioand small tapered micrometer tool electrode can be prepared online; and the vertical liquid film and the metal ring are dismantled after preparation, the tool electrode prepared is rotated to a vertical state, and then the tool electrode is transferred into an electrolytic wire cutting slot for electrolytic wire cutting machining.

Description

technical field [0001] The invention relates to a method and a device for preparing a micron-scale tool electrode with a large aspect ratio on-line by a vertical liquid film, and belongs to the technical field of electrochemical processing. Background technique [0002] With the development of various precision, microtechnology and microelectromechanical systems (MEMS), the preparation of tool electrodes with large aspect ratios on the micrometer scale has become more and more important. Microscale tool electrodes with large aspect ratio can be widely used in frontier fields such as microfabrication technology, microelectronics technology, biomedicine and aerospace technology. At present, the main preparation methods for micron-scale tool electrodes with large aspect ratio include micromachining technology, focused ion beam milling technology (FIB), wire discharge grinding technology (WEDG), confinement electrochemical deposition technology (LECD), electrochemical engraving ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23H3/00B23H3/04
CPCB23H3/00B23H3/04
Inventor 曾永彬桑雨萌杨涛
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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