A hydrogen purification method for vacuum coating and its realization device
A technology of vacuum coating and purification method, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., which can solve the problems of hydrogen purity decrease, low degree of automation, and influence on product process, and achieve improved regeneration effect , high degree of automation and high equipment utilization
Active Publication Date: 2021-07-13
OPTORUN SHANGHAI CO LTD
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Problems solved by technology
However, manual operation has the following disadvantages: 1. It is necessary to regularly inspect the color of silica gel to confirm whether the adsorbed substances are saturated, and the degree of automation is low; 2. During equipment maintenance or standby, the purity of hydrogen in the pipeline will decrease, which will affect the connection. down product process
[0005] Automatic operation, this method realizes the automatic switching of two sets of purifiers through PSA pressure swing adsorption method: 1. This method needs to install two sets of purifiers for switching, one purifier for work, and one purifier for regeneration, the system is more complicated
2. It is necessary to install multiple sets of valves and switching circuits to switch the purifier, which is prone to seal leakage and high system cost; 3. The type of purge gas and the design of the exhaust need to be considered
Method used
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[0022] Example: such as figure 1 As shown, the structure involved in the present invention includes from left to right a supplementary water pump 1, a water tank 3, an electrolysis generating unit 4, a gas-water separator 5, an oxygen removal device 7, a water removal and drying device 9, a coating chamber 15, and a molecular pump 17.
[0023] Wherein, the supplementary water pump 1 is connected to the water tank 3 through a pipeline, and the supplementary water pump 1 automatically injects water into the water tank 3 . The water tank 3 is connected with the electrolysis generating unit 4 , and the water tank 3 injects water into the electrolysis generating unit 4 . The electrolysis generating unit 4 is equipped with an anode and a cathode. After electrification, the water decomposes into oxygen ions and hydrogen ions at the anode, and the oxygen ions release electrons at the anode to form oxygen and release from the anode; under the action of the electric field force, the hy...
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The invention relates to the field of vacuum coating, in particular to a hydrogen purification method for vacuum coating and its realization device, which is characterized in that: when coating, the hydrogen produced by the hydrogen generating unit passes through the dewatering and drying device and then passes into the coating chamber room; when the water removal and drying device is regenerated, the water removal and drying device is heated, and a bypass gas is used to carry the water vapor generated by the heating of the water removal and drying device to complete the regeneration of the water removal and drying device; and, the When the dewatering and drying device is regenerated, the water vapor and bypass gas generated by the heating of the dewatering and drying device can be extracted from the dewatering and drying device under the drive of the exhaust system of the vacuum coating chamber. The advantages of the present invention are: high purity of produced hydrogen; good coating effect; clever use of the exhaust device and working gas of the vacuum coating system to improve the regeneration efficiency and regeneration effect of the dehydration and drying device, high equipment utilization rate, safety and reliability; operation Simple, high degree of automation and low cost.
Description
technical field [0001] The invention relates to the technical field of hydrogen purification, in particular to a hydrogen purification method for vacuum coating and a device for its realization. Background technique [0002] In order to realize the physical deposition process of precision thin films, hydrogen is used as the reaction gas. The process requires extremely high purity of the gas. The hydrogen produced by water electrolysis has the advantages of instant production and use, safety and environmental protection, and recyclable use. However, the output impurities of water electrolysis hydrogen production are mainly For water vapor. [0003] At present, the commonly used technical means for removing water vapor are: manual operation and automatic operation. [0004] Manual operation, this method uses related adsorbents for water vapor adsorption. When the adsorbents are saturated, the adsorbents need to be replaced to ensure the purity of the output hydrogen. However...
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IPC IPC(8): C23C14/56C25B1/04C25B15/08
CPCC23C14/0021C25B1/04C25B15/08Y02E60/36
Inventor 王德智谢雄星戴秀海
Owner OPTORUN SHANGHAI CO LTD