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A method for improving the quality factor of a microresonator by using the superposition of orthogonal modes and its realization device

A micro-resonator and quality factor technology, applied in the direction of impedance network, electrical components, etc., can solve the problems of increasing the complexity of the resonator system, not reporting the quality factor, unfavorable device miniaturization and integration, etc., achieving high cost performance and using Long-life, easy-to-handle effects

Active Publication Date: 2021-08-13
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the disadvantage of this solution is that two excitations must be applied to the resonator at the same time, which increases the complexity of the resonator system and is not conducive to the miniaturization and integration of devices.
[0005] Although the research on microresonators has been carried out since the 1990s, the research on the modal coupling of microresonators is an emerging research direction in recent years, and the research on modal coupling is generally in a vacuum There are few reports on the behavior of microresonator modal coupling in air, and there is no report on the method of using mode superposition to improve the quality factor

Method used

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  • A method for improving the quality factor of a microresonator by using the superposition of orthogonal modes and its realization device
  • A method for improving the quality factor of a microresonator by using the superposition of orthogonal modes and its realization device
  • A method for improving the quality factor of a microresonator by using the superposition of orthogonal modes and its realization device

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Embodiment 1

[0057] A method for improving the quality factor of a microresonator by superposition of orthogonal modes, the microresonator comprising two cantilevers and a beam connecting the two cantilevers, comprising the following steps:

[0058] (1) Simultaneous excitation and measurement of the orthogonal mode: focus the modulated laser on the middle of the bridge of the microresonator, that is, a rectangular area with a length of 1.25 mm and a width of 0.2 mm in the middle of the beam, so that it vibrates and excites Two mutually perpendicular orthogonal modes of the resonator; the wavelength of the modulated pulse laser is 375nm; this wavelength is in the band with the maximum absorption rate of SUS304 stainless steel.

[0059] Modulated laser light is shone onto the bridges of the microresonators to excite them to vibrate. Laser irradiation on the surface of the microresonator creates a temperature gradient through its thickness and causes it to bend. When a sinusoidal signal is i...

Embodiment 2

[0079] A realization device of a method for improving the quality factor of a microresonator by using the superposition of orthogonal modes described in Embodiment 1, such as figure 1 As shown, it includes a computer 3, a data acquisition card 2, a lock-in amplifier 1, a laser vibrometer controller 4, a modulation laser 6, a laser vibrometer probe 5, an adjustable power continuous laser 7, and a continuous laser power controller 9;

[0080] Computer 3, data acquisition card 2, lock-in amplifier 1 are connected sequentially, lock-in amplifier 1, laser vibrometer controller 4, laser vibrometer probe 5 are connected sequentially, lock-in amplifier 1 is connected to modulated laser 6, continuous laser power control Device 9 is connected to adjustable power continuous laser 7;

[0081] During use, the modulation laser 6 is connected to the center of the bridge of the microresonator, the laser vibrometer probe 5 is aligned with a cantilever of the microresonator, and the adjustable ...

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Abstract

The present invention relates to a method for improving the quality factor of a microresonator by superposition of orthogonal modes and its realization device, including: (1) Simultaneous excitation and measurement of the orthogonal mode: focusing the modulated pulse laser on the microresonator The bridge makes it vibrate, and excites two orthogonal modes of the resonator that are perpendicular to each other; (2) The adjustment of the orthogonal mode causes superposition: the thermal effect generated on the beam is tuned by using continuous laser irradiation on the microresonator Its first-order in-plane resonance mode and its nearest out-of-plane resonance mode are close to superposition; (3) measuring the vibration signal. Compared with the existing research, the invention only needs a modulated sinusoidal excitation signal and a heated steady-state laser to realize the superposition of two orthogonal modes, and the method is simple and repeatable.

Description

technical field [0001] The invention relates to a method for improving the quality factor of a micro-resonator by superposition of orthogonal modes and a realization device thereof, belonging to the technical field of micro-electromechanical device sensors. Background technique [0002] Micro-nano mechanical resonator is a micro-nano mechanical structure based on the principle of resonance to realize energy flow transfer, conversion and evolution. -electromechanical system, MEMS / NEMS) has attracted much attention in the fields of mechatronics, aerospace, information communication, biomedicine, energy environment, industrial control, etc. It is a key and hot research direction in this field. Its Specific applications include quality detection of viruses, chemical sensing of volatile substances, measurement of Casimir forces, and collection of vibrational energy. [0003] In the working process of resonant devices, energy dissipation is the main factor affecting the overall p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H3/02H03H3/04
CPCH03H3/02H03H3/04H03H2003/027H03H2003/0414
Inventor 刘铎罗雯耀张冬冬赵超鹏
Owner SHANDONG UNIV
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