Schottky diode structure and manufacturing method thereof
A technology of Schottky diode and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as weakening reverse voltage withstand capability, reducing forward conduction current of devices, and increasing on-resistance.
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[0054] Referring to the accompanying drawings, through the description of the embodiments, the specific embodiments of the present invention include the shape, structure, mutual position and connection relationship of each part, the function and working principle of each part, and the manufacturing process of the various components involved. And the method of operation and use, etc., are described in further detail to help those skilled in the art have a more complete, accurate and in-depth understanding of the inventive concepts and technical solutions of the present invention.
[0055] Such as figure 1 , 2 As shown, the junction barrier Schottky diode has a substrate, the substrate N type 4H-SiC type substrate, such as N + SiC substrate 1, the upper surface of the substrate is N - The first drift layer of conductivity type, such as N can be grown by CVD - SiC epitaxial layer 2 as the first drift layer, N - The thickness of SiC epitaxial layer 2 is 5um-100um, and the dopi...
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