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An optical fiber probe type cleaning and detection system and its production and use method

An optical fiber probe and cleaning technology, which is applied in cleaning methods and appliances, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems that cleaning technology cannot go deep into the inside of equipment and clean dead angles, so as to reduce manufacturing costs and difficulty in use , easy operation, high integration effect

Active Publication Date: 2020-06-23
STATE GRID SICHUAN ECONOMIC RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, and the purpose is to provide an optical fiber probe type cleaning and detection system and its production and use method, which solves the problem that the existing precision instrument cleaning technology cannot go deep into the interior of the equipment, and there are cleaning problems. dead end problem

Method used

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  • An optical fiber probe type cleaning and detection system and its production and use method
  • An optical fiber probe type cleaning and detection system and its production and use method
  • An optical fiber probe type cleaning and detection system and its production and use method

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Embodiment 1

[0038] like Figure 1 to Figure 6 As shown, a kind of optical fiber probe type cleaning of the present invention, detection system, comprises spectrum analyzer 1 and circulator 4, and described spectrum analyzer 1 comprises laser 7 and spectrometer 8, and described laser 7 is the broadband light source of 1505 to 1630nm , the output optical power is 0 to 6dBm; the spectrometer 8 is a multi-port optical power analyzer, the detectable wavelength range is 1505 to 1630nm, and the detectable power range is -80dBm to 10dBm.

[0039] The circulator 4 is a three-port unidirectional ring device, the circulator 4 includes an A port, a B port and a C port, and the optical signal can only be transmitted in one direction in the circulator 4, that is, the optical signal can only be transmitted along the A port To the B port, and then transmitted from the B port to the C port, and the C port is then transmitted to the A port, and the reverse direction is isolated.

[0040] Two front-section...

Embodiment 2

[0047] like figure 1 Described, a method for manufacturing an optical fiber probe type cleaning and detection system, comprising the following steps:

[0048] a) Connect the output end of the laser 7 to one end of the amplifier 3 to amplify the optical signal to realize the adjustable 0-300mw;

[0049] b) The A port of the circulator 4 is connected to the other end of the amplifier 3, and the B port is connected to the rear single-mode fiber 6;

[0050] c) Select a point on the single-mode optical fiber 6 in the rear section, fix it on the displacement table 9, and cut the end face of the single-mode optical fiber 6 in the rear section flat to form an optical fiber probe;

[0051] d) One end of the attenuator 2 is connected to the C port of the circulator 4, and the other end is connected to the spectrometer 8. The attenuator 2 attenuates the optical power to below the safe power of the spectrometer 8.

Embodiment 3

[0053] like Figure 1 to Figure 6 As shown, a method for using an optical fiber probe cleaning and detection system specifically includes the following steps:

[0054] Step 1: Immerse the surface to be cleaned 11 in the liquid, adjust the displacement table 9, so that the length L of the working chamber 16 is about 24-200 μm;

[0055] Step 2: Turn on the laser 1, adjust the displacement stage 9, move the fiber probe 10, and observe the interference signal on the spectrometer 8: if the interference signal is smooth, it indicates that the surface 11 to be cleaned is the clean surface; if the interference signal is not smooth, It is necessary to clean the cleaning surface 11 and fix the displacement stage 9;

[0056] Step 3: Slowly adjust the amplifier 3 to gradually increase the optical power until bubbles 12 are generated in the working cavity 16, such as Figure 4 As shown, the system enters the overall cleaning mode. The generation rate of bubbles can be controlled by adju...

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Abstract

The invention discloses an optical fiber probe type cleaning and detection system and a fabrication and application method thereof. The optical fiber probe type cleaning and detection system comprisesa spectral analyzer and an annular device, two front section single mode optical fibers are arranged between the spectral analyzer and the annular device, an attenuated device is arranged on one of the front section single mode optical fiber, and an amplifier is arranged on the other front section single mode fiber. A rear section single mode optical fiber is further arranged on the annular device, and a displacement table and an optical fiber probe are arranged on the rear section single mode fiber in sequence. According to the adjustable bubble cleaning and detection system, a working element is an optical fiber probe, and is easy to bend and move; the optical fiber has the good plasticity, the size of an optical fiber cone which produces bubbles can be small enough, penetrating into the device is facilitated, and the fixed point cleaning at any position is realized; the cleaning function is realized by using the bubbles in liquid, and the mechanical damage caused by a cleaning object is not caused; and the cleaning and cleanliness detection of cleaning surface can be realized at the same time, a cleaning element and a detection element are the same optical fiber probe, the structure is compact, and the integration is high.

Description

technical field [0001] The invention relates to the technical field of micromachining, in particular to an optical fiber probe type cleaning and detection system and its production and use method. Background technique [0002] Since the 21st century, with the advent of the intelligent age, more and more micro, precision devices and technical means have been involved in many fields such as electronics, information, and medicine. play a vital role. The reduced cleanliness inside the instrument will directly affect the performance, stability and service life of the instrument, and even cause potential safety hazards. In the field of micromachining, surface cleanliness affects processing quality. In the semiconductor industry, poor surface cleanliness will lead to chip failure, and the losses caused far exceed the faults in the manufacturing process; in optical processing, unclean optical substrates will lead to reduced film quality, increased optical loss, and reduced laser d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/10B08B13/00
Inventor 罗劲瑭陈一鸣姚实颖李均华芶继军高栋梁周惟婧祝和春余葭苇骆韬锐
Owner STATE GRID SICHUAN ECONOMIC RES INST
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