Method for quickly measuring object surface steps through spectrum confocal line scanning

Abstract

The invention discloses a method for rapidly measuring object surface steps through spectrum confocal line scanning. The method comprises: a spectrum confocal line scanning device is built; a standardplane mirror is detected, the position of the standard plane mirror is moved in the axial direction, meanwhile, the coordinate position of the standard plane mirror is monitored, and the dispersion focusing range of a chromatic dispersion focusing element and the wavelength-position relation curve of the spectrum confocal line scanning device are calibrated; the standard plane mirror is replacedwith a sample for detection, and the surface of the sample is placed in a dispersion focusing range of the chromatic dispersion focusing element; an intensity point spread function of a return signalof a spectrograph is analyzed, a peak coordinate position is calculated by using a centroid method to obtain a return signal wavelength, and according to the wavelength-position relation curve, the maximum height difference of the surface of the sample is decoded, and the steps of the surface of the sample are rapidly calculated. The method has the beneficial effects that the structure is simple,the measurement speed is high, precision is high, the application range is wide, and the method is suitable for precise measurement of transparent or opaque steps, grooves, inclined surfaces and the like.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a method for quickly measuring steps on the surface of an object by spectral confocal line scanning. Background technique [0002] Confocal Microscopy (Confocal Microscopy) is the most typical method to achieve optical tomography. The earliest confocal microscopy imaging device was proposed in 1961 by M. Invention patent right. Spectral confocal technology is developed on the basis of confocal microscope, a non-contact measurement method that combines the confocal principle of confocal microscopy technology and the principle of dispersion focusing. Compared with confocal microscopy technology, spectral confocal technology does not require an axial scanning device, which improves the measurement efficiency of ordinary confocal microscopes. At present, spectral confocal technology has had a wide impact in modern biology and medicine, physics, chemistry, ...

AI Technical Summary

Problems solved by technology

The traditional measurement method based on this method is single-point measurement, and only the height information of a point on the sample surface can be extracted during measurement. The spectral confocal system needs to be equipped with an X-Y plane or a horizontal two-dimensional scanning system when measuring the overall surface topography of the object. Therefore, Limits the application of measurement speed and real-time measurement in industrial field

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