Light source module unit for exposure and exposure device having same

Abstract

A light source module unit for exposure is disclosed. The disclosed light source module unit for exposure comprises: a light source panel having multiple ultraviolet light-emitting elements configuredin an array structure; and an optical panel having a plurality of unit condensing lenses integrated on a light-transmitting panel, which is arranged on the light emission side of a light-emitting element, in an integrated array arrangement structure such that the unit condensing lenses are biased from positions in which the same correspond to unit light-emitting elements, respectively, toward a specific reference center axis, which extends through center of the ultraviolet light-emitting element array, with reference to a main optical axis, thereby constituting a matrix-type array structure.Each unit condensing lens has a light incident surface formed in the shape of one selected from a planar surface, a concave surface having a curvature (R) of (-)0.15 or less, and a convex surface having a curvature (R ) of (+)0.15 or less. Each unit condensing lens has a light emission surface formed as a convex lens. The unit condensing lenses are arranged such that the distance (c1) of spacing between the ultraviolet light-emitting elements and the unit condensing lenses satisfies the value of C1 / d<0.5 with regard to the diameter (d) of the condensing lenses.

Description

technical field [0001] The present invention relates to a light source for exposure, and in more detail to an ultraviolet light emitting element (UVLED) light source module unit for exposure, which is used in photolithography (Photolithography) to form fine circuit patterns on semiconductor wafers or image display panels. ) process, in particular, relates to an ultraviolet light-emitting element (UV LED) light source module unit for exposure and an exposure device provided with the light source module unit, which is improved in the following form: use an optimal combination of modules to form a light source The shape and array arrangement structure of the ultraviolet light emitting element (UV LED) array (array) and the condenser lens integrated in the light-transmitting panel can be effectively achieved by maximizing the light output power (power) and illuminance distribution. While improving the exposure performance and exposure efficiency, the light source module provided i...

AI Technical Summary

Problems solved by technology

[0003] Usually, the light sources for exposure used in the existing exposure process mainly use ultra-high pressure mercury lamps or halogen lamps, but the fact is that, as well known, the existing light sources for exposure as described above are exposed due to low life and high consumption. Not only the low efficiency caused by electricity and the efficiency of the exposure process caused by high costs, but also many problems in the environment

[0004] In particular, recently, in the manufacture of thin film transistors (TFT, Thin Film Transistor) or color filters (CF, Color Filter) in the display field similar to liquid crystal displays (LCD) or organic light emitting diodes (OLED), the market has become increasingly interested in the use of exposure patterns. There is an urgent need for miniaturization technology to achieve ultra-high definition. However, due to the technical limitations of the miniaturization process of the exposure pattern using the existing exposure light source (Hg Lamp, mercury lamp), although it is a pity, the reality is that it cannot be realized as an exposure pattern. The miniaturization and ultra-high definition of the core technology of the display industry

[0005] In addition, due to the recent trend of miniaturization, increase in capacity, and high integration and high density of semiconductor elements, there is an increasing demand for miniaturization and high precision of exposure patterns. Therefore, there is a problem in using Existing light sources for exposure have limitations in meeting the current requirements for miniaturized patterns

Therefore, since the condensing efficiency decreases due to the light loss from the non-light-transmitting portion between the individual unit condensing lenses, there is a limit on the overall light output power and illuminance distribution map, making it difficult to pass through the fine details of the exposure pattern. The problem of realizing ultra-high-definition

[0010] In addition, the heat dissipation performance of the non-translucent metal panel of the existing light source module unit for exposure is limited. Therefore, the driving heat is accumulated and concentrated on the non-translucent metal panel, so that the driving time increases and the heat gradually increases. There is a problem of degradation of exposure quality due to reduction of light output power and illuminance profile

Therefore, there is a problem that the productivity of the exposure process decreases and the cost increases because of frequent replacement of the optical panel

[0011] And, with respect to existing exposure light source module unit, on the hole that is perforated in the lens panel 11 that is formed by non-translucent metal panel, set unit condenser lens 12 one by one, because such combination process, has the advantage of making manufacturing The problem of rising costs and falling productivity

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